Review of Cathodic Arc Deposition for Preparing Droplet-Free Thin Films

2006 ◽  
Author(s):  
Hirofumi Takikawa
Keyword(s):  
Thin Films ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition

scholarly journals Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition

2009 ◽  
Vol 61 (8) ◽  
pp. 789-792 ◽  
Author(s):  
Christoph Adelhelm ◽  
Thomas Pickert ◽  
Martin Balden ◽  
Marcin Rasinski ◽  
Tomasz Plocinski ◽  
...  
Keyword(s):  
Thin Films ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition

Photocatalytic Bactericidal Effect of TiO2 Thin Films Produced by Cathodic Arc Deposition Method

2003 ◽  
Vol 254-256 ◽  
pp. 463-466 ◽  
Author(s):  
B. Kepenek ◽  
U.Ö.Ş. Seker ◽  
A.F. Çakır ◽  
M. Ürgen ◽  
C. Tamerler
Keyword(s):  
Thin Films ◽  
Bactericidal Effect ◽  
Deposition Method ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition

Phase separated AlSi thin films prepared by filtered cathodic arc deposition

2009 ◽  
Vol 517 (5) ◽  
pp. 1567-1571 ◽  
Author(s):  
T. Saito ◽  
R. Horie ◽  
T. Den ◽  
A. Bendavid ◽  
E. Preston ◽  
...  
Keyword(s):  
Thin Films ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition

Plasma nitridation and microstructure of high-k ZrO2 thin films fabricated by cathodic arc deposition

2005 ◽  
Vol 277 (1-4) ◽  
pp. 422-427 ◽  
Author(s):  
A.P. Huang ◽  
Ricky K.Y. Fu ◽  
Paul K. Chu ◽  
L. Wang ◽  
W.Y. Cheung ◽  
...  
Keyword(s):  
Thin Films ◽  
Plasma Nitridation ◽  
Cathodic Arc Deposition ◽  
High K ◽  
Cathodic Arc ◽  
Arc Deposition

scholarly journals Transparent and conductive indium doped cadmium oxide thin films prepared by pulsed filtered cathodic arc deposition

2013 ◽  
Vol 265 ◽  
pp. 738-744 ◽  
Author(s):  
Yuankun Zhu ◽  
Rueben J. Mendelsberg ◽  
Jiaqi Zhu ◽  
Jiecai Han ◽  
André Anders
Keyword(s):  
Thin Films ◽  
Cadmium Oxide ◽  
Oxide Thin Films ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition

Structural and mechanical properties of Cr–Al–O–N thin films grown by cathodic arc deposition

2012 ◽  
Vol 60 (19) ◽  
pp. 6494-6507 ◽  
Author(s):  
A. Khatibi ◽  
J. Sjölen ◽  
G. Greczynski ◽  
J. Jensen ◽  
P. Eklund ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition
Sign in / Sign up

Export Citation Format

Share Document