plasma nitridation
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2022 ◽  
Vol 1 (2) ◽  
pp. 49-53
Author(s):  
Angga Yunis Prasetya ◽  
Darmanto Darmanto ◽  
Muhammad Dzulfikar

Nitriding has been carried out using plasma nitriding techniques for surface treatment of Titanium as a biomaterial component. The purpose of this study was to determine the effect of plasma nitriding on surface hardness that occurs in titanium. The material used is Titanium Alloy (Ti-6Al-4V) Grade 5 which is processed by plasma nitriding by varying nitrogen (N2) and argon (Ar) gases of (100% N2/0% Ar), (95% N2/5% Ar), (90% N2/10% Ar), (85% N2/15% Ar), (80% N2/20% Ar), and (75% N2/25% Ar), and temperature 400ºC, time 5 hours and a pressure of 1.6 bar. The test results show that the optimum hardness is found in the gas composition with a ratio of 95% N2: 5% Ar. Obtained a hardness of 371 HV/VHN or an increase of 159% of the raw material with hardness value of 143 HV/VHN


Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1251
Author(s):  
Chang-Hua Yu ◽  
Kun-An Chiu ◽  
Thi-Hien Do ◽  
Li Chang ◽  
Wei-Chun Chen

Plasma nitridation of an amorphous SiO2 layer on Si (110) substrate can form well-aligned α-Si3N4 crystallites in fibrous morphology. Nitriding is performed at a temperature in the range of 800–1000 °C by using microwave plasma with a gas mixture of N2 and H2. Raman spectroscopy shows the characteristics of an α-Si3N4 phase without other crystalline nitrides. As shown by scanning electron microscopy, the formed α-Si3N4 microfibers on the Si substrate can be in a dense and straight array nearly along with Si <11¯0>, and can have a length over 2 mm with a diameter in the range of 5–10 μm. Structural characterization of scanning transmission electron microscopy in cross section view reveals that the elongated α-Si3N4 crystallites are formed on the surface of the nitrided SiO2/Si (110) substrate without any interlayers between Si3N4 and Si, and the longitudinal direction of α-Si3N4 appears mainly along <112¯0>, which is approximately parallel to Si <11¯0>.


2021 ◽  
Vol 11 (19) ◽  
pp. 9309
Author(s):  
Enikő Bitay ◽  
László Tóth ◽  
Tünde Anna Kovács ◽  
Zoltán Nyikes ◽  
Attila Levente Gergely

It is desirable to improve tool steel wear resistance to produce pieces with precise dimensions and increase the lifetime of tools. The aim of this work was to modify the surface of 1.2344 (X40CrMoV5-1) hot work tool steel to improve the wear properties. Surface modification was achieved in three steps: first, hardening was applied, followed by plasma nitridation and, finally, physical vapor deposition (PVD) was employed to produce a TiN/AlTiN multilayer coating. The microhardness and the wear coefficient of the surfaces were measured. PVD coating showed the highest hardness value, 2938 HV0,01, whereas plasma nitridation followed by PVD resulted in 2679 HV0,01. The surface modification resulted in an increase in surface roughness in all cases compared to the hardened sample. However, the wear coefficient showed a significant decrease for the surface treated samples. The lowest wear coefficient of K = 1.47 10–10 mm3/Nm, which is a magnitude lower than the reference hardened sample (K = 6.32 10–9 mm3/Nm), was achieved employing both plasma nitridation and PVD. The results confirm that the use of a combined surface modification of plasma nitridation and PVD significantly improve the wear resistance of the treated samples.


Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1221
Author(s):  
Jun-Hyoung Park ◽  
Ji-Ho Cho ◽  
Jung-Sik Yoon ◽  
Jung-Ho Song

We present a non-invasive approach for monitoring plasma parameters such as the electron temperature and density inside a radio-frequency (RF) plasma nitridation device using optical emission spectroscopy (OES) in conjunction with multivariate data analysis. Instead of relying on a theoretical model of the plasma emission to extract plasma parameters from the OES, an empirical correlation was established on the basis of simultaneous OES and other diagnostics. Additionally, we developed a machine learning (ML)-based virtual metrology model for real-time Te and ne monitoring in plasma nitridation processes using an in situ OES sensor. The results showed that the prediction accuracy of electron density was 97% and that of electron temperature was 90%. This method is especially useful in plasma processing because it provides in-situ and real-time analysis without disturbing the plasma or interfering with the process.


2021 ◽  
Vol 130 (6) ◽  
pp. 063301
Author(s):  
Kazushi Yoshida ◽  
Hiromasa Ohmi ◽  
Kiyoshi Yasutake ◽  
Hiroaki Kakiuchi

Coatings ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 784
Author(s):  
Bing-Jyh Lu ◽  
Keng-Ta Lin ◽  
Yi-Ming Kuo ◽  
Cheng-Hsien Tsai

In this study, different amounts of SiO2 nanoparticles (7 nm) were added to simultaneously reach high transmittance, high hardness, and high adhesion for TiO2 film prepared by the sol–gel method and coated on glass through a dip-coating technique. For the film to achieve self-cleaning, anti-fogging, superhydrophilicity, and visible photo-induced photocatalysis, TiO2-SiO2 film was modified via a rapid microwave plasma-nitridation process for efficient N-doping by various N2-containing gases (N2, N2/Ar/O2, N2/Ar). Through nitrogen plasma, the content of N atom reached 1.3% with the ratio of O/Ti atom being 2.04. The surface of the thin films was smooth, homogeneous, and did not crack, demonstrated by the root mean square (RMS) roughness of film surface being 3.29–3.94 nm. In addition, the films were composed of nanoparticles smaller than 10 nm, with a thickness of about 100 nm, as well as the crystal phase of the thin film being anatase. After the plasma-nitridation process, the visible-light transmittance of N-doped TiO2-SiO2 films was 89.7% (clean glass = 90.1%). Moreover, the anti-fogging ability was excellent (contact angle < 5°) even without light irradiation. The degradation of methylene blue showed that the photocatalytic performance of N-doped TiO2-SiO2 films was apparently superior to that of unmodified films under visible-light irradiation. Moreover, the pencil hardness and adhesion rating test of the thin films were 7H and 5B, respectively, indicating that the obtained coatings had great mechanical stability.


2020 ◽  
Vol 3 (1) ◽  
pp. 50-54
Author(s):  
László Tóth ◽  
Tünde Kovács ◽  
Zoltán Nyikes ◽  
Mhatre Umesh

AbstractFor evolving a surface layer on the X40CrMoV5-1 steel, a plasma-nitridation and PVD coating process was applied. In our experiments, the samples were heat-treated (high-temperature hardening, annealed three times) and surface treatments (plasma-nitridation, PVD coating by TiAlN, duplex surface treating by plasma nitridation and after that, PVD coating TiAlN). After the heat treatments, we performed hardness tests and surface abrasion wear tests. The abrasion wear resistance of the specimens was studied in order to understand the heat treatment effects on abrasion behaviour. It was observed that the heat treatment and surface treatment process greatly influence the tool steel surface hardness and abrasion resistance behaviour. By plasma-nitridation the surface hardness doubled compared to the quenched surface hardness while the PVD coated TiAlN surface layer hardness is more than five times that of the hardened one. There was no relevant difference between the PVD coated (TiAlN) surface hardness and the duplex surface-treated hardness. On the basis of the results of the comparative abrasive wear tests, it can be concluded that the duplex surface treatment resulted in the greatest wear resistance..


2019 ◽  
Vol 3 (3) ◽  
pp. 225-232
Author(s):  
Seiji Inumiya ◽  
Takayuki Aoyama ◽  
Yasuo Nara

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