High-speed epitaxial growth of AlN above by hydride vapor phase epitaxy

2007 ◽  
Vol 300 (1) ◽  
pp. 42-44 ◽  
Author(s):  
Toru Nagashima ◽  
Manabu Harada ◽  
Hiroyuki Yanagi ◽  
Yoshinao Kumagai ◽  
Akinori Koukitu ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
High Speed ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

GaN epitaxial growth on 4 degree off-axis Si- and C-face 4H-SiC without buffer layers by tri-halide vapor-phase epitaxy with high-speed wafer rotation

2019 ◽  
Vol 58 (SC) ◽  
pp. SC1039
Author(s):  
Kazukuni Hara ◽  
Shigeyuki Takaki ◽  
Shinichi Tanishita ◽  
Daisuke Uematsu ◽  
Yuto Hoshino ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
High Speed ◽  
Vapor Phase Epitaxy ◽  
Buffer Layers

Improvement of AlN crystalline quality with high epitaxial growth rates by hydride vapor phase epitaxy

2007 ◽  
Vol 305 (2) ◽  
pp. 355-359 ◽  
Author(s):  
Toru Nagashima ◽  
Manabu Harada ◽  
Hiroyuki Yanagi ◽  
Hiroyuki Fukuyama ◽  
Yoshinao Kumagai ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Growth Rates ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Crystalline Quality

Thermodynamic Analysis of Various Types of Hydride Vapor Phase Epitaxy System for High-Speed Growth of InN

2006 ◽  
Vol 45 (No. 45) ◽  
pp. L1203-L1205 ◽  
Author(s):  
Jun Kikuchi ◽  
Yuuki Nishizawa ◽  
Hisashi Murakami ◽  
Yoshinao Kumagai ◽  
Akinori Koukitu
Keyword(s):  
Thermodynamic Analysis ◽  
Vapor Phase ◽  
High Speed ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Epitaxial growth and photoluminescence investigations of InP/InAs quantum well grown by hydride vapor phase epitaxy

1991 ◽  
Author(s):  
Henri Banvillet ◽  
E. Gil-Lafon ◽  
A. M. Vasson ◽  
R. Cadoret ◽  
A. Tabata ◽  
...  
Keyword(s):  
Quantum Well ◽  
Epitaxial Growth ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Thick GaN Epitaxial Growth with Low Dislocation Density by Hydride Vapor Phase Epitaxy

1997 ◽  
Vol 36 (Part 2, No. 7B) ◽  
pp. L899-L902 ◽  
Author(s):  
Akira Usui ◽  
Haruo Sunakawa ◽  
Akira Sakai ◽  
A. Atsushi Yamaguchi
Keyword(s):  
Dislocation Density ◽  
Epitaxial Growth ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Low Dislocation Density

Homo-epitaxial growth of n-GaN layers free from carbon-induced mobility collapse and off-angle-dependent doping variation by quartz-free hydride vapor phase epitaxy

2020 ◽  
Vol 117 (1) ◽  
pp. 012103 ◽  
Author(s):  
Hajime Fujikura ◽  
Taichiro Konno ◽  
Takeshi Kimura ◽  
Yoshinobu Narita ◽  
Fumimasa Horikiri
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

scholarly journals Epitaxial growth of three dimensionally structured III-V photonic crystal via hydride vapor phase epitaxy

2015 ◽  
Vol 118 (22) ◽  
pp. 224303 ◽  
Author(s):  
Qiye Zheng ◽  
Honggyu Kim ◽  
Runyu Zhang ◽  
Mauro Sardela ◽  
Jianmin Zuo ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Epitaxial Growth ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy
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