Improvement of AlN crystalline quality with high epitaxial growth rates by hydride vapor phase epitaxy

2007 ◽  
Vol 305 (2) ◽  
pp. 355-359 ◽  
Author(s):  
Toru Nagashima ◽  
Manabu Harada ◽  
Hiroyuki Yanagi ◽  
Hiroyuki Fukuyama ◽  
Yoshinao Kumagai ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Growth Rates ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Crystalline Quality

High-speed epitaxial growth of AlN above by hydride vapor phase epitaxy

2007 ◽  
Vol 300 (1) ◽  
pp. 42-44 ◽  
Author(s):  
Toru Nagashima ◽  
Manabu Harada ◽  
Hiroyuki Yanagi ◽  
Yoshinao Kumagai ◽  
Akinori Koukitu ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
High Speed ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Epitaxial growth and photoluminescence investigations of InP/InAs quantum well grown by hydride vapor phase epitaxy

1991 ◽  
Author(s):  
Henri Banvillet ◽  
E. Gil-Lafon ◽  
A. M. Vasson ◽  
R. Cadoret ◽  
A. Tabata ◽  
...  
Keyword(s):  
Quantum Well ◽  
Epitaxial Growth ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Thick GaN Epitaxial Growth with Low Dislocation Density by Hydride Vapor Phase Epitaxy

1997 ◽  
Vol 36 (Part 2, No. 7B) ◽  
pp. L899-L902 ◽  
Author(s):  
Akira Usui ◽  
Haruo Sunakawa ◽  
Akira Sakai ◽  
A. Atsushi Yamaguchi
Keyword(s):  
Dislocation Density ◽  
Epitaxial Growth ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Low Dislocation Density

The influence of sapphire substrate orientation on crystalline quality of GaN films grown by hydride vapor phase epitaxy

2009 ◽  
Vol 404 (23-24) ◽  
pp. 4919-4921
Author(s):  
Anatolij Govorkov ◽  
Alexsandr Donskov ◽  
Lev Diakonov ◽  
Yulia Kozlova ◽  
Sergej Malahov ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Sapphire Substrate ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Crystalline Quality ◽  
Substrate Orientation

Homo-epitaxial growth of n-GaN layers free from carbon-induced mobility collapse and off-angle-dependent doping variation by quartz-free hydride vapor phase epitaxy

2020 ◽  
Vol 117 (1) ◽  
pp. 012103 ◽  
Author(s):  
Hajime Fujikura ◽  
Taichiro Konno ◽  
Takeshi Kimura ◽  
Yoshinobu Narita ◽  
Fumimasa Horikiri
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Hydride vapor phase epitaxy of GaN boules using high growth rates

2010 ◽  
Vol 312 (18) ◽  
pp. 2537-2541 ◽  
Author(s):  
E. Richter ◽  
U. Zeimer ◽  
S. Hagedorn ◽  
M. Wagner ◽  
F. Brunner ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Growth Rates ◽  
High Growth ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Improved crystalline quality nonpolar a-GaN films grown by hydride vapor phase epitaxy

2008 ◽  
Vol 26 (6) ◽  
pp. 1937-1941 ◽  
Author(s):  
A. A. Donskov ◽  
L. I. D’yakonov ◽  
A. V. Govorkov ◽  
Y. P. Kozlova ◽  
S. S. Malakhov ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Crystalline Quality
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