Process design of the pulse injection method for low-temperature metal organic vapor phase epitaxial growth of AlN at 800°C
2009 ◽
Vol 311
(2)
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pp. 383-388
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Keyword(s):
2007 ◽
Vol 46
(No. 38)
◽
pp. L927-L929
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Keyword(s):
2011 ◽
Vol 314
(1)
◽
pp. 252-257
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2003 ◽
Vol 32
(7)
◽
pp. 656-660
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Keyword(s):
Keyword(s):
1985 ◽
Vol 3
(5)
◽
pp. 1450
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Keyword(s):
2002 ◽
Vol 236
(1-3)
◽
pp. 31-36
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Keyword(s):