Low Temperature Metal Organic Vapor Phase Epitaxial Growth of AlN by Pulse Injection Method at 800 °C

2007 ◽  
Vol 46 (No. 38) ◽  
pp. L927-L929 ◽  
Author(s):  
Jung-Seung Yang ◽  
Hassanet Sodabanlu ◽  
Ichitaro Waki ◽  
Masakazu Sugiyama ◽  
Yoshiaki Nakano ◽  
...  
Keyword(s):  
Low Temperature ◽  
Epitaxial Growth ◽  
Vapor Phase ◽  
Injection Method ◽  
Pulse Injection ◽  
Organic Vapor ◽  
Metal Organic

Process design of the pulse injection method for low-temperature metal organic vapor phase epitaxial growth of AlN at 800°C

2009 ◽  
Vol 311 (2) ◽  
pp. 383-388 ◽  
Author(s):  
Jung-Seung Yang ◽  
Hassanet Sodabanlu ◽  
Ichitaro Waki ◽  
Masakazu Sugiyama ◽  
Yoshiaki Nakano ◽  
...  
Keyword(s):  
Low Temperature ◽  
Epitaxial Growth ◽  
Vapor Phase ◽  
Process Design ◽  
Injection Method ◽  
Pulse Injection ◽  
Organic Vapor ◽  
Metal Organic

Metal-organic vapor-phase epitaxial growth of HgCdTe device heterostructures on three-inch-diameter substrates

2003 ◽  
Vol 32 (7) ◽  
pp. 656-660 ◽  
Author(s):  
C. D. Maxey ◽  
J. P. Camplin ◽  
I. T. Guilfoy ◽  
J. Gardner ◽  
R. A. Lockett ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Organic Vapor ◽  
Metal Organic

scholarly journals Study on electrical properties of n-GaN grown at low temperature by metal-organic vapor phase epitaxy

2008 ◽  
Vol 57 (9) ◽  
pp. 5923
Author(s):  
Wang Lai ◽  
Zhang Xian-Peng ◽  
Xi Guang-Yi ◽  
Zhao Wei ◽  
Li Hong-Tao ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Low Temperature ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Metal Organic

Epitaxial growth of InGaAs on misoriented GaAs(100) substrate by metal-organic vapor phase epitaxy

2002 ◽  
Vol 236 (1-3) ◽  
pp. 31-36 ◽  
Author(s):  
Y Takano ◽  
M Masuda ◽  
K Kobayashi ◽  
K Kuwahara ◽  
S Fuke ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Metal Organic

InGaAs/GaAsP superlattice solar cells with reduced carbon impurity grown by low-temperature metal-organic vapor phase epitaxy using triethylgallium

2014 ◽  
Vol 116 (20) ◽  
pp. 203101 ◽  
Author(s):  
Hiromasa Fujii ◽  
Kasidit Toprasertpong ◽  
Hassanet Sodabanlu ◽  
Kentaroh Watanabe ◽  
Masakazu Sugiyama ◽  
...  
Keyword(s):  
Solar Cells ◽  
Low Temperature ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Carbon Impurity ◽  
Organic Vapor ◽  
Metal Organic
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