Preparation of the c-axis oriented AlN film by laser chemical vapor deposition using a newly proposed Al(acac)3 precursor

2013 ◽  
Vol 365 ◽  
pp. 1-5 ◽  
Author(s):  
Yu You ◽  
Akihiko Ito ◽  
Rong Tu ◽  
Takashi Goto
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Aln Film

High‐speed laser chemical vapor deposition of copper: A search for optimum conditions

1989 ◽  
Vol 65 (6) ◽  
pp. 2470-2474 ◽  
Author(s):  
B. Markwalder ◽  
M. Widmer ◽  
D. Braichotte ◽  
H. van den Bergh
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Optimum Conditions ◽  
Laser Chemical Vapor Deposition

Fractal growth of sp3-bonded 5H-BN microcones by plasma-assisted laser chemical vapor deposition

2006 ◽  
Vol 99 (12) ◽  
pp. 123512 ◽  
Author(s):  
Shojiro Komatsu ◽  
Daisuke Kazami ◽  
Hironori Tanaka ◽  
Yusuke Moriyoshi ◽  
Masaharu Shiratani ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Fractal Growth

Impedance spectroscopy of Ba4Ti13O30 film prepared by laser chemical vapor deposition

2012 ◽  
Vol 28 (2-3) ◽  
pp. 197-201 ◽  
Author(s):  
Dongyun Guo ◽  
Takashi Goto ◽  
Chuanbin Wang ◽  
Qiang Shen ◽  
Lianmeng Zhang
Keyword(s):  
Chemical Vapor Deposition ◽  
Impedance Spectroscopy ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition
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