High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution

2015 ◽  
Vol 133 ◽  
pp. 23-35 ◽  
Author(s):  
Shinji Okazaki
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
High Throughput ◽  
Electron Beam Lithography ◽  
Optical Lithography ◽  
Nano Fabrication

High-throughput, high-resolution electron-beam lithography

1988 ◽  
Vol 32 (4) ◽  
pp. 494-501 ◽  
Author(s):  
H. C. Pfeiffer ◽  
T. R. Groves ◽  
T. H. Newman
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
High Throughput ◽  
Electron Beam Lithography ◽  
Resolution Electron

High resolution spin-on electron beam lithography resist with exceptional dry etching resistance

2015 ◽  
Vol 1 (1) ◽  
pp. 13-19 ◽  
Author(s):  
G. Grenci ◽  
E. Zanchetta ◽  
A. Pozzato ◽  
G. Della Giustina ◽  
G. Brusatin ◽  
...  
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Electron Beam Lithography ◽  
Dry Etching

High resolution electron beam lithography on CaF2

1984 ◽  
Vol 44 (4) ◽  
pp. 468-469 ◽  
Author(s):  
P. M. Mankiewich ◽  
H. G. Craighead ◽  
T. R. Harrison ◽  
A. H. Dayem
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Electron Beam Lithography ◽  
Resolution Electron
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