High-throughput, high-resolution electron beam lithography
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1988 ◽
Vol 32
(4)
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pp. 494-501
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2015 ◽
Vol 133
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pp. 23-35
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2013 ◽
Vol 31
(6)
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pp. 06F102
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2004 ◽
Vol 22
(6)
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pp. 3485
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