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Heinrich Kurz
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Electron Beam Lithography ◽  
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Electron Beam ◽  
High Resolution ◽  
Electron Beam Lithography ◽  
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scholarly journals mr-PosEBR: a novel positive tone resist for high resolution electron beam lithography and 3D surface patterning

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Robert Kirchner ◽  
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R Baghdadi ◽  
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S L Prischepa ◽  
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Keyword(s):  
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High Resolution ◽  
Porous Silicon ◽  
Electron Beam Lithography ◽  
Resolution Electron
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