RETRACTED: Monitoring and Analyzing Volatile Organic Compounds in Fabs by Gas Chromatograph/Surface Acoustic Wave sensors

2016 ◽  
Vol 126 ◽  
pp. 96
Author(s):  
Shih-Cheng Hu ◽  
Angus Shiue ◽  
Yi-Chan Chih
Keyword(s):  
Volatile Organic Compounds ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Organic Compounds ◽  
Gas Chromatograph ◽  
Acoustic Wave Sensors ◽  
Volatile Organic ◽  
Wave Sensors

Detection of volatile organic compounds using surface acoustic wave sensors with different polymer coatings

2004 ◽  
Vol 467 (1-2) ◽  
pp. 234-238 ◽  
Author(s):  
M.C. Horrillo ◽  
M.J. Fernández ◽  
J.L. Fontecha ◽  
I. Sayago ◽  
M. Garcı́a ◽  
...  
Keyword(s):  
Volatile Organic Compounds ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Organic Compounds ◽  
Polymer Coatings ◽  
Acoustic Wave Sensors ◽  
Volatile Organic ◽  
Wave Sensors

scholarly journals Development of a Surface Acoustic Wave Sensor for In-Situ Monitoring of Volatile Organic Compounds

Sensors ◽  
2003 ◽  
Vol 3 (7) ◽  
pp. 236-247 ◽  
Author(s):  
Clifford Ho ◽  
Eric Lindgren ◽  
K. Rawlinson ◽  
Lucas McGrath ◽  
Jerome Wright
Keyword(s):  
Volatile Organic Compounds ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Organic Compounds ◽  
In Situ Monitoring ◽  
Acoustic Wave Sensor ◽  
Volatile Organic

Determination of volatile organic compounds in air by a surface acoustic wave array

2015 ◽  
Vol 44 (1) ◽  
pp. 54-64 ◽  
Author(s):  
Ahmet Özmen ◽  
Mehmet Ali Ebeoğlu ◽  
Bekir Mumyakmaz ◽  
Deniz Balta
Keyword(s):  
Volatile Organic Compounds ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Organic Compounds ◽  
Volatile Organic

scholarly journals Characteristics of Surface Acoustic Wave Sensors with Nanoparticles Embedded in Polymer Sensitive Layers for VOC Detection

Sensors ◽  
2018 ◽  
Vol 18 (7) ◽  
pp. 2401 ◽  
Author(s):  
Cristian Viespe ◽  
Dana Miu
Keyword(s):  
Acoustic Wave ◽  
Response Time ◽  
Frequency Shift ◽  
Surface Acoustic Wave ◽  
Limit Of Detection ◽  
Saw Sensor ◽  
Acoustic Wave Sensors ◽  
Volatile Organic ◽  
Wave Sensors ◽  
Better Than

Surface Acoustic Wave (SAW) sensors with several types of polymer sensing films, containing embedded Fe3O4 nanoparticles (NPs) with various dimensions and concentrations, were studied. A sensor with a sensing film consisting of the polymer alone was used for comparison. NPs with a mean diameter of 7 nm were produced by laser ablation with 5 ns pulse durations, and NPs with 13 nm diameters were obtained with a laser having 10 ps pulse durations. The properties of the Surface Acoustic Wave sensors with such sensing films were analyzed. Their response (frequency shift, sensitivity, noise and response time) to three different volatile organic components (VOCs) at various concentrations were compared with one another. The frequency shift and sensitivity increased with increasing NP concentration in the polymer for a given NP dimension and with decreasing NP diameter for a given concentration. The best results were obtained for the smallest NPs used. The SAW sensor containing 7 nm NPs had a limit of detection (LOD) of 65 ppm (almost five times better than the sensor with polymer alone), and a response time of about 9 s for ethanol.

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