Effects of oxygen content on the structural, optical, and electrical properties of NiO films fabricated by radio-frequency magnetron sputtering

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2017.09.002 ◽

2017 ◽

Vol 71 ◽

pp. 396-400 ◽

Author(s):

J.D. Hwang ◽

T.H. Ho

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Oxygen Content ◽

Radio Frequency Magnetron ◽

Optical And Electrical Properties ◽

Radio Frequency Magnetron Sputtering ◽

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Optical and electrical properties of Zn1−xCdxO films grown on Si substrates by reactive radio-frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.2378527 ◽

2006 ◽

Vol 89 (18) ◽

pp. 181923 ◽

Author(s):

C. W. Sun ◽

P. Xin ◽

C. Y. Ma ◽

Z. W. Liu ◽

Q. Y. Zhang ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Optical And Electrical Properties ◽

Radio Frequency Magnetron Sputtering ◽

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Optical and electrical properties of p-type transparent conducting CuAlO2 thin film synthesized by reactive radio frequency magnetron sputtering technique

Indian Journal of Physics ◽

10.1007/s12648-010-0124-x ◽

2010 ◽

Vol 84 (10) ◽

pp. 1341-1346 ◽

Author(s):

B. Saha ◽

R. Thapa ◽

S. Jana ◽

K. K. Chattopadhyay

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Optical And Electrical Properties ◽

Radio Frequency Magnetron Sputtering ◽

Transparent Conducting ◽

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Structural, optical and electrical properties of AZO/Cu/AZO tri-layer films prepared by radio frequency magnetron sputtering and ion-beam sputtering

Vacuum ◽

10.1016/j.vacuum.2008.05.029 ◽

2008 ◽

Vol 83 (2) ◽

pp. 257-260 ◽

Author(s):

Tianlin Yang ◽

Zhisheng Zhang ◽

Shumei Song ◽

Yanhui Li ◽

MaoShui Lv ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Ion Beam ◽

Radio Frequency Magnetron ◽

Optical And Electrical Properties ◽

Radio Frequency Magnetron Sputtering ◽

Ion Beam Sputtering ◽

Beam Sputtering

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Fabrication of Mg3Sb2 thin films via radio-frequency magnetron sputtering and analysis of the corresponding electrical properties

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-021-06468-3 ◽

2021 ◽

Author(s):

Jun-ichi Tani ◽

Hiromichi Ishikawa

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Electrical properties of plasma display panel with Mg1−xZnxO protecting thin films deposited by a radio frequency magnetron sputtering method

Applied Physics Letters ◽

10.1063/1.1899238 ◽

2005 ◽

Vol 86 (15) ◽

pp. 153503 ◽

Author(s):

E. Y. Jung ◽

S. G. Lee ◽

S. H. Sohn ◽

D. K. Lee ◽

H. K. Kim

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Plasma Display Panel ◽

Radio Frequency Magnetron Sputtering ◽

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Structural and electrical properties of CuIn1−xAlxSe2 thin films prepared by radio-frequency magnetron sputtering process

Applied Surface Science ◽

10.1016/j.apsusc.2014.11.131 ◽

2015 ◽

Vol 326 ◽

pp. 211-215 ◽

Author(s):

Jun Zhang ◽

Hongmei Deng ◽

Jun He ◽

Xiankuan Meng ◽

Tantan Liu ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Electrical Properties

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Structural and electrical properties of tantalum nitride thin films fabricated by using reactive radio-frequency magnetron sputtering

Applied Physics A ◽

10.1007/s003390000691 ◽

2001 ◽

Vol 73 (2) ◽

pp. 229-236 ◽

Author(s):

H.B. Nie ◽

S.Y. Xu ◽

S.J. Wang ◽

L.P. You ◽

Z. Yang ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Tantalum Nitride ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Electrical Properties

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Electrical properties and crystal structure of (Ba,Sr)TiO3 films prepared at low temperatures on a LaNiO3 electrode by radio-frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.118380 ◽

1997 ◽

Vol 70 (2) ◽

pp. 249-251 ◽

Author(s):

Chung Ming Chu ◽

Pang Lin

Keyword(s):

Crystal Structure ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Low Temperatures ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Lanio3 Electrode

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Characterization of (Pb1-xLax)TiO3 thin films grown by radio-frequency magnetron sputtering and their electrical properties

Integrated Ferroelectrics ◽

10.1080/10584589508012264 ◽

1995 ◽

Vol 10 (1-4) ◽

pp. 63-72 ◽

Author(s):

Su-Jin Chae ◽

Sang-Shik Park ◽

Soon-Gil Yoon ◽

Won-Jae Lee ◽

Ho-Gi Kim

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Temperature Dependence of the Electrical Properties of SrBi2Ta2 O 9 Thin Films Deposited by Radio‐Frequency Magnetron Sputtering

Journal of The Electrochemical Society ◽

10.1149/1.1838459 ◽

1998 ◽

Vol 145 (4) ◽

pp. 1330-1334 ◽

Author(s):

Cheol‐Hoon Yang ◽

Sang‐Shik Park ◽

Soon‐Gil Yoon

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Temperature Dependence ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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