Investigation on surface smoothing of silicon-on-insulator with gas phase hydrogen chloride etching

2021 ◽  
Vol 130 ◽  
pp. 105842
Author(s):  
Nan Gao ◽  
Yuan Gao ◽  
Meng Chen ◽  
Hongtao Xu ◽  
Zhongying Xue ◽  
...  
Keyword(s):  
Gas Phase ◽  
Hydrogen Chloride ◽  
Silicon On Insulator ◽  
Surface Smoothing

The gas-phase reaction of ClONO2 with hydrogen chloride

1987 ◽  
Vol 5 (1) ◽  
Author(s):  
Roger Atkinson ◽  
SaraM. Aschmann ◽  
ErnestoC. Tuazon ◽  
MarkA. Goodman ◽  
ArthurM. Winer
Keyword(s):  
Gas Phase ◽  
Hydrogen Chloride ◽  
Phase Reaction ◽  
Gas Phase Reaction

scholarly journals The kinetics of the hydrogen chloride oxidation

2013 ◽  
Vol 78 (12) ◽  
pp. 2115-2130 ◽  
Author(s):  
Martinez Gonzalez ◽  
Tanja Vidakovic-Koch ◽  
Rafael Kuwertz ◽  
Ulrich Kunz ◽  
Thomas Turek ◽  
...  
Keyword(s):  
Kinetic Parameters ◽  
Gas Phase ◽  
Hydrogen Chloride ◽  
Reaction Order ◽  
Membrane Electrode ◽  
Polarization Data ◽  
Rate Determining Step ◽  
Electrode Assemblies ◽  
Apparent Kinetic Parameters ◽  
Kinetics Of

Hydrogen chloride (HCl) oxidation has been investigated on technical membrane electrode assemblies in a cyclone flow cell. Influence of Nafion loading, temperature and hydrogen chloride mole fraction in the gas phase has been studied. The apparent kinetic parameters like reaction order with respect to HCl, Tafel slope and activation energy have been determined from polarization data. The apparent kinetic parameters suggest that the recombination of adsorbed Cl intermediate is the rate determining step.

Gas-phase elimination kinetics of selected aliphatic α,β-unsaturated aldehydes catalyzed by hydrogen chloride

2015 ◽  
Vol 28 (4) ◽  
pp. 261-265 ◽  
Author(s):  
Libia L. Julio ◽  
José R. Mora ◽  
Alexis Maldonado ◽  
Gabriel Chuchani
Keyword(s):  
Gas Phase ◽  
Hydrogen Chloride ◽  
Elimination Kinetics ◽  
Unsaturated Aldehydes ◽  
Kinetics Of ◽  
Phase Elimination

scholarly journals Energy‐Efficient Gas‐Phase Electrolysis of Hydrogen Chloride

2019 ◽  
Vol 91 (6) ◽  
pp. 795-808 ◽  
Author(s):  
Simon Bechtel ◽  
Tanja Vidaković‐Koch ◽  
Kai Sundmacher
Keyword(s):  
Gas Phase ◽  
Hydrogen Chloride ◽  
Energy Efficient

Catalysis by hydrogen halides in the gas phase. XIV. Methyl trimethylacetate and hydrogen bromide and the effects of added alcohols

1968 ◽  
Vol 21 (3) ◽  
pp. 687 ◽  
Author(s):  
JTD Cross ◽  
VR Stimson
Keyword(s):  
Carbon Monoxide ◽  
Methyl Ester ◽  
Gas Phase ◽  
Hydrogen Chloride ◽  
Hydrogen Bromide ◽  
Hydrogen Halides ◽  
Kinetic Form

Hydrogen bromide and hydrogen chloride catalyse the decomposition of methyl trimethylacetate into isobutene, carbon monoxide, and methanol at 370-442� and 450-48O�, respectively. The kinetic form, which is basically 1 : 1, is severely modified by the effect of methanol either produced in the reaction or added initially. Water or alcohols react with an intermediate in the catalysed decomposition of trimethylacetic acid or its methyl ester in esterification-like reactions; some of the resultant esters subsequently decompose to olefin and acid.

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