Charge collection studies of proton-irradiated n- and p-type epitaxial silicon detectors

Author(s):  
J. Lange ◽  
J. Becker ◽  
D. Eckstein ◽  
E. Fretwurst ◽  
R. Klanner ◽  
...  
2015 ◽  
Vol 6 (9) ◽  
pp. 1666-1673 ◽  
Author(s):  
Jiewei Liu ◽  
Sandeep Pathak ◽  
Thomas Stergiopoulos ◽  
Tomas Leijtens ◽  
Konrad Wojciechowski ◽  
...  

2009 ◽  
Vol 56 (1) ◽  
pp. 337-345 ◽  
Author(s):  
Masashi Takada ◽  
Tomoya Nunomiya ◽  
Takeshi Ishikura ◽  
T. Nakamura

1995 ◽  
Vol 386 ◽  
Author(s):  
John Lowell ◽  
Valerie Wenner ◽  
Damon Debusk

ABSTRACTIn CMOS, the use of epitaxial layers for prevention of latch-up in logic technologies is well-known and pervasive. One of the crucial parameters is the amount of metallic contamination due to transition metals such as Fe in the epi since this phenomena effects both device performance and quality. However, the ability to measure this parameter on product material is not generally available due to inherent problems with most known methods. The limitation of traditional surface photovoltage is that the deep optical penetration of over a hundred microns is well-beyond the depth of most epitaxial layers and does not accurately profile the epitaxial region [1]. In this paper we report on the application of optical surface photovoltage (SPV) using a set of ultra-shallow optical filters to both quantify and qualify as-grown epitaxial layers on CZ P-type silicon. We believe that a non-contact, SPV measurement of Fe concentration and diffusion lengths within an epitaxial region has not been previously reported.


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