Molecular dynamics simulations of surface smoothing and sputtering process with glancing-angle gas cluster ion beams

2007 ◽  
Vol 257 (1-2) ◽  
pp. 645-648 ◽  
Author(s):  
Takaaki Aoki ◽  
Jiro Matsuo
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulations ◽  
Ion Beams ◽  
Surface Smoothing ◽  
Glancing Angle ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Dynamics Simulations

Morphology dependence of surface smoothing of Ar gas cluster ion beams

2005 ◽  
pp. 241-244
Author(s):  
S. Houzumi ◽  
T. Mashita ◽  
N. Toyoda ◽  
K. Mochiji ◽  
T. Mitamura ◽  
...  
Keyword(s):  
Ion Beams ◽  
Surface Smoothing ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Ar Gas

scholarly journals Molecular dynamics simulations for gas cluster ion beam processes

Vacuum ◽  
2010 ◽  
Vol 84 (8) ◽  
pp. 994-998 ◽  
Author(s):  
Takaaki Aoki ◽  
Toshio Seki ◽  
Jiro Matsuo
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulations ◽  
Ion Beam ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam ◽  
Dynamics Simulations

Surface smoothing effects with reactive cluster ion beams

1998 ◽  
Vol 54 (1-3) ◽  
pp. 106-110 ◽  
Author(s):  
Noriaki Toyoda ◽  
Hiroaki Kitani ◽  
Norihisa Hagiwara ◽  
Jiro Matsuo ◽  
Isao Yamada
Keyword(s):  
Ion Beams ◽  
Surface Smoothing ◽  
Smoothing Effects ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Reactive Cluster

scholarly journals The effects of cluster size on sputtering and surface smoothing of PMMA with gas cluster ion beams

2011 ◽  
Vol 36 (3) ◽  
pp. 309-312 ◽  
Author(s):  
K. Ichiki ◽  
S. Ninomiya ◽  
T. Seki ◽  
T. Aoki ◽  
J. Matsuo
Keyword(s):  
Cluster Size ◽  
Ion Beams ◽  
Surface Smoothing ◽  
Cluster Ion Beams ◽  
Cluster Ion
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