Influence of annular magnet on discharge characteristics in enhanced glow discharge plasma immersion ion implantation
2009 ◽
Vol 267
(8-9)
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pp. 1696-1700
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2008 ◽
Vol 372
(40)
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pp. 6183-6186
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2014 ◽
Vol 85
(6)
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pp. 063506
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2011 ◽
Vol 82
(2)
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pp. 023503
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