Improved ion implant fluence uniformity in hydrogen enhanced glow discharge plasma immersion ion implantation into silicon

2014 ◽  
Vol 85 (6) ◽  
pp. 063506 ◽  
Author(s):  
J. Luo ◽  
L. H. Li ◽  
H. T. Liu ◽  
K. M. Yu ◽  
Y. Xu ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Discharge Plasma ◽  
Glow Discharge Plasma ◽  
Plasma Immersion Ion Implantation

Impact energy and retained dose uniformity in enhanced glow discharge plasma immersion ion implantation

2009 ◽  
Vol 95 (6) ◽  
pp. 061503 ◽  
Author(s):  
Qiu Yuan Lu ◽  
Liu He Li ◽  
Jian Hui Li ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Impact Energy ◽  
Discharge Plasma ◽  
Glow Discharge Plasma ◽  
Dose Uniformity ◽  
Plasma Immersion Ion Implantation
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