Silicon microphone development and application
2007 ◽
Vol 133
(2)
◽
pp. 283-287
◽
Keyword(s):
Keyword(s):
1997 ◽
Vol 61
(1-3)
◽
pp. 352-355
◽
Keyword(s):
Keyword(s):
2007 ◽
Vol 135
(2)
◽
pp. 420-425
◽
2006 ◽
Vol 120
(3)
◽
pp. 1168
Keyword(s):
Keyword(s):