A Study of High Sensitive Diaphragm for Silicon Microphone Applications
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1997 ◽
Vol 61
(1-3)
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pp. 352-355
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2007 ◽
Vol 135
(2)
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pp. 420-425
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2006 ◽
Vol 120
(3)
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pp. 1168
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1996 ◽
Vol 53
(1-3)
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pp. 232-236
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