MEMS Silicon Microphone
1999 ◽
Vol T79
(1)
◽
pp. 275
◽
Altti Torkkeli
◽
Jaakko Saarilahti
◽
Heikki Sepp?
◽
Hannu Sipola
◽
Outi Rusanen
◽
...
1997 ◽
Vol 61
(1-3)
◽
pp. 352-355
◽
Christiane Thielemann
◽
Gisela Hess
Ray-hua Horng
◽
Zong-ying. Lin
◽
Yu-ning Jiang
◽
Shang-hua You
◽
Shu-zhen Zhun
◽
...
Lu-po Liao
◽
Wen-chieh Chou
◽
Yu-chun Hsu
2007 ◽
Vol 135
(2)
◽
pp. 420-425
◽
Yoshinori Iguchi
◽
Masahide Goto
◽
Masakazu Iwaki
◽
Akio Ando
◽
Kenkichi Tanioka
◽
...
2006 ◽
Vol 120
(3)
◽
pp. 1168
Sung Bok Lee
◽
Peter V. Loeppert
Shusaku Nomura
◽
Yasushi Hanasaka
◽
Masako Hasegawa-Ohira
◽
Tadashi Ishiguro
◽
Hiroshi Ogawa
H.-T. Mammen
◽
U. Sturmer
◽
M. Koch
◽
H. Kohne
◽
K.-F. Becker
◽
...
1996 ◽
Vol 53
(1-3)
◽
pp. 232-236
◽
Jesper Bay
◽
Ole Hansen
◽
Siebe Bouwstra