silicon microphone Latest Research Papers

Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask

Microelectronic Engineering ◽

10.1016/j.mee.2018.12.004 ◽

2019 ◽

Vol 206 ◽

pp. 17-24 ◽

Cited By ~ 3

Author(s):

Jirawat Jantawong ◽

Nithi Atthi ◽

Chana Leepattarapongpan ◽

Awirut Srisuwan ◽

Wutthinan Jeamsaksiri ◽

...

Keyword(s):

Film Thickness ◽

Silicon Microphone

Encyclopedia of Nanotechnology ◽

10.1007/978-94-017-9780-1_102198 ◽

2016 ◽

pp. 3669-3669

Keyword(s):

Silicon Microphone

Encyclopedia of Nanotechnology ◽

10.1007/978-90-481-9751-4_100759 ◽

2012 ◽

pp. 2420-2420

Author(s):

Yimei Zhu ◽

Hiromi Inada ◽

Achim Hartschuh ◽

Li Shi ◽

Ada Della Pia ◽

...

Keyword(s):

Silicon Microphone

Identification of human pulse waveform by silicon microphone chip

2011 IEEE International Conference on Systems, Man, and Cybernetics ◽

10.1109/icsmc.2011.6083829 ◽

2011 ◽

Cited By ~ 3

Author(s):

Shusaku Nomura ◽

Yasushi Hanasaka ◽

Masako Hasegawa-Ohira ◽

Tadashi Ishiguro ◽

Hiroshi Ogawa

Keyword(s):

Pulse Waveform ◽

Silicon Microphone

MEMS Silicon Microphone

Crystalline Silicon - Properties and Uses ◽

10.5772/21277 ◽

2011 ◽

Author(s):

Bahram Azizollah

Keyword(s):

Silicon Microphone

Fabrication of Electret Using Soft X-ray Irradiation for Silicon Microphone

The Journal of The Institute of Image Information and Television Engineers ◽

10.3169/itej.64.1003 ◽

2010 ◽

Vol 64 (7) ◽

pp. 1003-1006

Author(s):

Masahide Goto ◽

Kei Hagiwara ◽

Yoshinori Iguchi ◽

Yoshinobu Yasuno ◽

Hidekazu Kodama ◽

...

Keyword(s):

X Ray ◽

Silicon Microphone

Measurement Results of the First Two Chip Silicon Microphone with Low Stress Nickel Membrane Covering Full Audio Range

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805498 ◽

2009 ◽

Author(s):

S. Junge ◽

F. Jakobs ◽

W. Lang

Keyword(s):

Measurement Results ◽

Silicon Microphone ◽

Audio Range

Analysis of active damping of a silicon microphone using a linear controller

2008 American Control Conference ◽

10.1109/acc.2008.4587080 ◽

2008 ◽

Author(s):

Jinli Qu ◽

N. Eva Wu ◽

Ronald N. Miles ◽

Henik Vargas

Keyword(s):

Active Damping ◽

Linear Controller ◽

Silicon Microphone

Silicon microphone with wide frequency range and high linearity

Sensors and Actuators A Physical ◽

10.1016/j.sna.2006.08.016 ◽

2007 ◽

Vol 135 (2) ◽

pp. 420-425 ◽

Cited By ~ 20

Author(s):

Yoshinori Iguchi ◽

Masahide Goto ◽

Masakazu Iwaki ◽

Akio Ando ◽

Kenkichi Tanioka ◽

...

Keyword(s):

Wide Frequency Range ◽

Frequency Range ◽

High Linearity ◽

Silicon Microphone

Silicon microphone development and application

Sensors and Actuators A Physical ◽

10.1016/j.sna.2006.06.035 ◽

2007 ◽

Vol 133 (2) ◽

pp. 283-287 ◽

Cited By ~ 27

Author(s):

Alfons Dehé

Keyword(s):

Silicon Microphone

silicon microphone
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Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask