silicon microphone
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Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask

2019 ◽  
Vol 206 ◽  
pp. 17-24 ◽  
Author(s):  
Jirawat Jantawong ◽  
Nithi Atthi ◽  
Chana Leepattarapongpan ◽  
Awirut Srisuwan ◽  
Wutthinan Jeamsaksiri ◽  
...  
Keyword(s):  
Film Thickness ◽  
Silicon Microphone

Silicon Microphone

2012 ◽  
pp. 2420-2420
Author(s):  
Yimei Zhu ◽  
Hiromi Inada ◽  
Achim Hartschuh ◽  
Li Shi ◽  
Ada Della Pia ◽  
...  
Keyword(s):  
Silicon Microphone

Identification of human pulse waveform by silicon microphone chip

2011 ◽  
Author(s):  
Shusaku Nomura ◽  
Yasushi Hanasaka ◽  
Masako Hasegawa-Ohira ◽  
Tadashi Ishiguro ◽  
Hiroshi Ogawa
Keyword(s):  
Pulse Waveform ◽  
Silicon Microphone

scholarly journals Fabrication of Electret Using Soft X-ray Irradiation for Silicon Microphone

2010 ◽  
Vol 64 (7) ◽  
pp. 1003-1006
Author(s):  
Masahide Goto ◽  
Kei Hagiwara ◽  
Yoshinori Iguchi ◽  
Yoshinobu Yasuno ◽  
Hidekazu Kodama ◽  
...  
Keyword(s):  
X Ray ◽  
Silicon Microphone

Silicon microphone with wide frequency range and high linearity

2007 ◽  
Vol 135 (2) ◽  
pp. 420-425 ◽  
Author(s):  
Yoshinori Iguchi ◽  
Masahide Goto ◽  
Masakazu Iwaki ◽  
Akio Ando ◽  
Kenkichi Tanioka ◽  
...  
Keyword(s):  
Wide Frequency Range ◽  
Frequency Range ◽  
High Linearity ◽  
Silicon Microphone
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