An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors

Sensors and Actuators A Physical ◽

10.1016/j.sna.2007.03.014 ◽

2007 ◽

Vol 139 (1-2) ◽

pp. 233-236 ◽

Author(s):

Hiroaki Yamazaki ◽

Tamio Ikehashi ◽

Tatsuya Ohguro ◽

Etsuji Ogawa ◽

Kenji Kojima ◽

...

Keyword(s):

Rf Mems ◽

Capacitive Switches ◽

Actuation Method

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Charging Processes in Silicon Nitride Films for RF-MEMS Capacitive Switches: The Effect of Deposition Method and Film Thickness

10.1557/proc-1139-gg03-37 ◽

2008 ◽

Author(s):

George Papaioannou ◽

Usama Zaghloul ◽

Robert Plana ◽

Fabio Coccetti ◽

Patrick Pons ◽

...

Keyword(s):

Silicon Nitride ◽

Film Thickness ◽

Rf Mems ◽

Deposition Method ◽

Capacitive Switches ◽

Silicon Nitride Films

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Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys

Sensors and Actuators A Physical ◽

10.1016/j.sna.2006.07.002 ◽

2007 ◽

Vol 135 (1) ◽

pp. 262-272 ◽

Author(s):

Cari F. Herrmann ◽

Frank W. DelRio ◽

David C. Miller ◽

Steven M. George ◽

Victor M. Bright ◽

...

Keyword(s):

Rf Mems ◽

Atomic Layer ◽

Dielectric Films ◽

Capacitive Switches

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Polyimide film based RF MEMS capacitive switches

2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278) ◽

10.1109/mwsym.2002.1011882 ◽

2003 ◽

Author(s):

R. Ramadoss ◽

S. Lee ◽

V.M. Bright ◽

Y.C. Lee ◽

K.C. Gupta

Keyword(s):

Rf Mems ◽

Polyimide Film ◽

Capacitive Switches

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RF MEMS capacitive switches fabricated with HDICP CVD SiN/sub x/

2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278) ◽

10.1109/mwsym.2002.1011600 ◽

2003 ◽

Author(s):

C.H. Chang ◽

J.Y. Qian ◽

B.A. Cetiner ◽

Q. Xu ◽

M. Bachman ◽

...

Keyword(s):

Rf Mems ◽

Capacitive Switches

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Electro/thermal measurements of RF MEMS capacitive switches

IEEE MTT-S International Microwave Symposium Digest, 2003 ◽

10.1109/mwsym.2003.1210534 ◽

2003 ◽

Author(s):

R.M. Reano ◽

D. Peroulis ◽

J.F. Whitaker

Keyword(s):

Rf Mems ◽

Capacitive Switches ◽

Thermal Measurements

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Performance of low-loss RF MEMS capacitive switches

IEEE Microwave and Guided Wave Letters ◽

10.1109/75.704410 ◽

1998 ◽

Vol 8 (8) ◽

pp. 269-271 ◽

Author(s):

C.L. Goldsmith ◽

Zhimin Yao ◽

S. Eshelman ◽

D. Denniston

Keyword(s):

Rf Mems ◽

Capacitive Switches ◽

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Understanding and improving longevity in RF MEMS capacitive switches

10.1117/12.770586 ◽

2008 ◽

Author(s):

Chuck Goldsmith ◽

David Forehand ◽

Derek Scarbrough ◽

Zheng Peng ◽

Cris Palego ◽

...

Keyword(s):

Rf Mems ◽

Capacitive Switches

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Effect of Environmental Humidity on Dielectric Charging Effect in RF MEMS Capacitive Switches Based on $C$– $V$ Properties

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2012.2237384 ◽

2013 ◽

Vol 22 (3) ◽

pp. 637-645 ◽

Author(s):

Lifeng Wang ◽

Jie-Ying Tang ◽

Qing-An Huang

Keyword(s):

Rf Mems ◽

Capacitive Switches ◽

Dielectric Charging ◽

Environmental Humidity ◽

Charging Effect

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Investigation on Switching Structure Material Selection for RF-MEMS Shunt Capacitive Switches Using Ashby, TOPSIS and VIKOR

Transactions on Electrical and Electronic Materials ◽

10.1007/s42341-018-00094-3 ◽

2019 ◽

Vol 20 (3) ◽

pp. 181-188 ◽

Author(s):

Deepankar Deshmukh ◽

Mahesh Angira

Keyword(s):

Rf Mems ◽

Material Selection ◽

Capacitive Switches ◽

Switching Structure ◽

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Thermally activated discharging mechanisms in SiNx films with embedded CNTs for RF MEMS capacitive switches

Microelectronic Engineering ◽

10.1016/j.mee.2020.111230 ◽

2020 ◽

Vol 223 ◽

pp. 111230

Author(s):

M. Koutsoureli ◽

G. Stavrinidis ◽

D. Birmpiliotis ◽

G. Konstantinidis ◽

G. Papaioannou

Keyword(s):

Rf Mems ◽

Capacitive Switches ◽

Thermally Activated

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