Thermal flow sensors for MEMS spirometric devices

2010 ◽  
Vol 162 (2) ◽  
pp. 373-378 ◽  
Author(s):  
F. Hedrich ◽  
K. Kliche ◽  
M. Storz ◽  
S. Billat ◽  
M. Ashauer ◽  
...  
Keyword(s):  
Thermal Flow ◽  
Flow Sensors

scholarly journals Novel Thermal Flow Sensors Based on a Wheatstone Bridge Read-out

2009 ◽  
Vol 1 (1) ◽  
pp. 136-139 ◽  
Author(s):  
A. Talić ◽  
S. Ćerimović ◽  
R. Beigelbeck ◽  
F. Kohl ◽  
A. Jachimowicz ◽  
...  
Keyword(s):  
Wheatstone Bridge ◽  
Thermal Flow ◽  
Flow Sensors

scholarly journals B4.3 - INKtelligent Printing® of Scale Comprehensive Electrical Connections for Thermal Flow Sensors

2009 ◽  
Author(s):  
Christoph Sosna ◽  
Hannes Sturm ◽  
Rainer Buchner ◽  
Walter Lang ◽  
Christian Werner ◽  
...  
Keyword(s):  
Thermal Flow ◽  
Flow Sensors ◽  
Electrical Connections

Thermal Flow Sensors for Very Small Flow Rate

2001 ◽  
pp. 1436-1439 ◽  
Author(s):  
M. Ashauer ◽  
H. Scholz ◽  
R. Briegel ◽  
H. Sandmaier ◽  
W. Lang
Keyword(s):  
Flow Rate ◽  
Thermal Flow ◽  
Flow Sensors ◽  
Small Flow Rate ◽  
Small Flow

MEMS Thermal Flow Sensors— An Accuracy Investigation

2019 ◽  
Vol 19 (8) ◽  
pp. 2991-2998 ◽  
Author(s):  
Ethan L. W. Gardner ◽  
Timothy A. Vincent ◽  
Rhys G. Jones ◽  
Julian W. Gardner ◽  
John Coull ◽  
...  
Keyword(s):  
Thermal Flow ◽  
Flow Sensors

An Offset Compensation Method With Low Residual Drift for Integrated Thermal Flow Sensors

2011 ◽  
Vol 11 (5) ◽  
pp. 1162-1168 ◽  
Author(s):  
Paolo Bruschi ◽  
Michele Dei ◽  
Massimo Piotto
Keyword(s):  
Compensation Method ◽  
Thermal Flow ◽  
Flow Sensors ◽  
Residual Drift ◽  
Offset Compensation

Simulation of the thermal behaviour of thermal flow sensors by equivalent electrical circuits

1994 ◽  
Vol 41 (1-3) ◽  
pp. 275-278 ◽  
Author(s):  
F.J. Auerbach ◽  
G. Meiendres ◽  
R. Müller ◽  
G.J.E. Scheller
Keyword(s):  
Thermal Behaviour ◽  
Thermal Flow ◽  
Flow Sensors ◽  
Electrical Circuits

scholarly journals Diode-based CMOS MEMS thermal flow sensors

2017 ◽  
Author(s):  
Andrea De Luca ◽  
Claudio Falco ◽  
Ethan L.W. Gardner ◽  
John D. Coull ◽  
Florin Udrea
Keyword(s):  
Thermal Flow ◽  
Flow Sensors ◽  
Cmos Mems
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