Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals

Sensors and Actuators A Physical ◽

10.1016/j.sna.2019.111541 ◽

2019 ◽

Vol 297 ◽

pp. 111541 ◽

Author(s):

Fei-Hong Bao ◽

Jing-Fu Bao ◽

Joshua En-Yuan Lee ◽

Lei-Lei Bao ◽

Muhammad Ammar Khan ◽

...

Keyword(s):

Quality Factor ◽

Phononic Crystals ◽

Frame Structure ◽

Mems Resonator ◽

Piezoelectric Mems

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Suspended Frame Structure with Phononic Crystals for Anchor Loss Reduction of MEMS Resonator

2018 IEEE International Frequency Control Symposium (IFCS) ◽

10.1109/fcs.2018.8597503 ◽

2018 ◽

Author(s):

Fei-Hong Bao ◽

Mohammed Awad ◽

Xin-Yi Li ◽

Zhao-Hui Wu ◽

Jing-Fu Bao ◽

...

Keyword(s):

Phononic Crystals ◽

Frame Structure ◽

Loss Reduction ◽

Mems Resonator ◽

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On-chip Feedthrough Cancellation Technique for Enhanced Electrical Characterization of a Piezoelectric MEMS Resonator in Water

Procedia Engineering ◽

10.1016/j.proeng.2016.11.463 ◽

2016 ◽

Vol 168 ◽

pp. 1573-1576 ◽

Author(s):

Abid Ali ◽

Joshua E.-Y. Lee

Keyword(s):

Electrical Characterization ◽

Mems Resonator ◽

Piezoelectric Mems ◽

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Lock-in driven quality factor enhancement with parasitic effect compensation of a self-actuated piezoelectric MEMS cantilever

2012 IEEE International Ultrasonics Symposium ◽

10.1109/ultsym.2012.0548 ◽

2012 ◽

Author(s):

M. Kucera ◽

T. Manzaneque ◽

J.L. Sanchez-Rojas ◽

A. Bittner ◽

U. Schmid

Keyword(s):

Quality Factor ◽

Parasitic Effect ◽

Piezoelectric Mems ◽

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Spider Web-Shaped Phononic Crystals for Quality Factor Improvement of Piezoelectric-on-Silicon MEMS resonators

2019 IEEE International Ultrasonics Symposium (IUS) ◽

10.1109/ultsym.2019.8926212 ◽

2019 ◽

Author(s):

Xueqian Wu ◽

Feihong Bao ◽

Xin Zhou ◽

Qidie Wu ◽

Jiacheng Liu ◽

...

Keyword(s):

Quality Factor ◽

Phononic Crystals ◽

Mems Resonators

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Effects of slots on thermoelastic quality factor of a vertical beam MEMS resonator

Microsystem Technologies ◽

10.1007/s00542-015-2652-y ◽

2015 ◽

Vol 22 (11) ◽

pp. 2723-2730 ◽

Author(s):

Saeid Asadi ◽

Tahereh Fanaei Sheikholeslami

Keyword(s):

Quality Factor ◽

Mems Resonator ◽

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Design of a high-Q, low-impedance, GHz-range piezoelectric mems resonator

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215606 ◽

2004 ◽

Author(s):

B. Antkowiak ◽

J.P. Gorman ◽

M. Varghese ◽

D.J.D. Carter ◽

A.E. Duwel

Keyword(s):

High Q ◽

Mems Resonator ◽

Piezoelectric Mems

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AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2015.7051079 ◽

2015 ◽

Author(s):

Haoshen Zhu ◽

Joshua E.-Y. Lee

Keyword(s):

Phononic Crystals ◽

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AlN MEMS Resonator with High Quality Factor

10.1109/eftf/ifcs52194.2021.9604259 ◽

2021 ◽

Author(s):

Wenli Liu ◽

Jinchao Li ◽

Zeji Chen ◽

Yinfang Zhu ◽

Jinling Yang ◽

...

Keyword(s):

Quality Factor ◽

High Quality Factor ◽

High Quality ◽

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Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing

Sensors and Actuators A Physical ◽

10.1016/j.sna.2014.10.002 ◽

2014 ◽

Vol 220 ◽

pp. 305-315 ◽

Author(s):

Tomás Manzaneque ◽

Víctor Ruiz-Díez ◽

Jorge Hernando-García ◽

Elisabeth Wistrela ◽

Martin Kucera ◽

...

Keyword(s):

Mems Resonator ◽

Piezoelectric Mems ◽

Viscosity Sensing

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A 12–18 GHz electrostatically tunable liquid metal RF MEMS resonator with quality factor of 1400–1840

2011 IEEE MTT-S International Microwave Symposium ◽

10.1109/mwsym.2011.5973368 ◽

2011 ◽

Author(s):

W. Irshad ◽

D. Peroulis

Keyword(s):

Liquid Metal ◽

Quality Factor ◽

Rf Mems ◽

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