Good electrical and mechanical properties induced by the multilayer graphene oxide sheets incorporated to amorphous carbon films

2010 ◽  
Vol 12 (7) ◽  
pp. 1183-1187 ◽  
Author(s):  
Junyan Zhang ◽  
Yuanlie Yu ◽  
Deming Huang
Keyword(s):  
Mechanical Properties ◽  
Graphene Oxide ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Multilayer Graphene ◽  
Amorphous Carbon Films ◽  
Graphene Oxide Sheets

Tribo-mechanical properties and biocompatibility of Ag-containing amorphous carbon films deposited onto Ti6Al4V

2021 ◽  
pp. 127384
Author(s):  
Wolfgang Tillmann ◽  
Nelson Filipe Lopes Dias ◽  
Carlo Franke ◽  
David Kokalj ◽  
Dominic Stangier ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films

scholarly journals The influence of hydrogen concentration in amorphous carbon films on mechanical properties and fluorine penetration: a density functional theory and ab initio molecular dynamics study

RSC Advances ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 6822-6830 ◽  
Author(s):  
Hwanyeol Park ◽  
Daekwang Woo ◽  
Jong Myeong Lee ◽  
Se Jun Park ◽  
Sungwoo Lee ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Amorphous Carbon ◽  
Density Functional ◽  
Carbon Films ◽  
Ab Initio Molecular Dynamics ◽  
Functional Theory ◽  
Amorphous Carbon Films ◽  
Mask Material ◽  
Strong Candidate ◽  
Significant Attention

Amorphous carbon films have attracted significant attention due to their superior mechanical and electronic properties, making them a strong candidate as an etch hard mask material for the fabrication of future integrated semiconductor devices.

Effect of the bias voltage on the structural and tribo-mechanical properties of Ag-containing amorphous carbon films

2020 ◽  
Vol 105 ◽  
pp. 107803
Author(s):  
Wolfgang Tillmann ◽  
Nelson Filipe Lopes Dias ◽  
Dominic Stangier ◽  
Alexander Nienhaus ◽  
Carl Arne Thomann ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Bias Voltage ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films
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