Study of mechanical properties and stress of tetrahedral amorphous carbon films prepared by pulse biasing
2005 ◽
Vol 195
(2-3)
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pp. 338-343
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1997 ◽
Vol 76
(3)
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pp. 351-361
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2001 ◽
Vol 10
(2)
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pp. 145-152
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2002 ◽
Vol 25
(3)
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pp. 269-280
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1999 ◽
Vol 120-121
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pp. 601-606
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2004 ◽
Vol 13
(4-8)
◽
pp. 1416-1421
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