Two-dimensional numerical simulation of non-uniform plasma immersion ion implantation

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2004.04.008 ◽

2004 ◽

Vol 186 (1-2) ◽

pp. 47-52 ◽

Author(s):

X.B Tian ◽

S.Q Yang ◽

Y.X Huang ◽

C.Z Gong ◽

G.C Xu ◽

...

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Two Dimensional ◽

Plasma Immersion Ion Implantation ◽

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Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.07.010 ◽

2007 ◽

Vol 201 (9-11) ◽

pp. 5458-5462 ◽

Author(s):

Y.X. Huang ◽

X.B. Tian ◽

S.Q. Yang ◽

Ricky K.Y. Fu ◽

Paul K. Chu

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Particle In Cell ◽

Plasma Immersion Ion Implantation ◽

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Numerical simulation of plasma immersion ion implantation of a finite-length cylindrical bore with auxiliary electrode by two-dimensional fluid model

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677638 ◽

2002 ◽

Author(s):

T.K. Kwok ◽

T.E. Sheridan ◽

X.C. Zeng ◽

P.K. Chu

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Finite Length ◽

Fluid Model ◽

Two Dimensional ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Studies of the effects of the bore length during plasma immersion ion implantation of a small cylindrical bore with auxiliary electrode by two-dimensional fluid model

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677723 ◽

2002 ◽

Author(s):

T.K. Kwok ◽

X.C. Zeng ◽

P.K. Chu

Keyword(s):

Ion Implantation ◽

Fluid Model ◽

Two Dimensional ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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3-D Numerical Simulation on Plasma Immersion Ion Implantation Batch Treating Process of Bearing Balls

IEEE Transactions on Plasma Science ◽

10.1109/tps.2016.2631547 ◽

2017 ◽

Vol 45 (1) ◽

pp. 39-42 ◽

Author(s):

Yonghao Yu ◽

Langping Wang ◽

Xiaofeng Wang ◽

Yang Lu

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Plasma Immersion Ion Implantation

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Two-dimensional modeling and simulation for dynamic sheath expansion during plasma immersion ion implantation

IEEE Transactions on Plasma Science ◽

10.1109/27.774681 ◽

1999 ◽

Vol 27 (3) ◽

pp. 766-771 ◽

Author(s):

Shu Qin ◽

Yuanzhong Xhou ◽

Chung Chan

Keyword(s):

Ion Implantation ◽

Modeling And Simulation ◽

Two Dimensional ◽

Dimensional Modeling ◽

Plasma Immersion Ion Implantation

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Two-dimensional texture and sheath evolution in metal plasma immersion ion implantation

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.01.115 ◽

2005 ◽

Vol 200 (1-4) ◽

pp. 589-593 ◽

Author(s):

S. Mändl ◽

G. Thorwarth ◽

B. Stritzker ◽

B. Rauschenbach

Keyword(s):

Ion Implantation ◽

Two Dimensional ◽

Metal Plasma ◽

Plasma Immersion Ion Implantation

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Numerical Simulation of Metal Plasma Immersion Ion Implantation and Deposition (MEPIIID) on a Sharp Cone and a Fine Tip

IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science ◽

10.1109/plasma.2005.359280 ◽

2005 ◽

Author(s):

Dixon T. K. Kwok ◽

Christophe Cornet

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Metal Plasma ◽

Plasma Immersion Ion Implantation ◽

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Two-dimensional particle-in-cell plasma immersion ion implantation simulation of gear/windmill geometry in cylindrical co-ordinates along the (r–θ) plane

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00130-5 ◽

2002 ◽

Vol 156 (1-3) ◽

pp. 97-102 ◽

Author(s):

D.T.K Kwok ◽

R.K.Y Fu ◽

P.K Chu

Keyword(s):

Ion Implantation ◽

Two Dimensional ◽

Particle In Cell ◽

Cell Plasma ◽

Plasma Immersion Ion Implantation

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Numerical Simulation of Metal Plasma Immersion Ion Implantation and Deposition on a Dielectric Wedge

IEEE Transactions on Plasma Science ◽

10.1109/tps.2006.878432 ◽

2006 ◽

Vol 34 (4) ◽

pp. 1059-1065 ◽

Author(s):

D.T.-K. Kwok

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Dielectric Wedge ◽

Metal Plasma ◽

Plasma Immersion Ion Implantation

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Three-dimensional effects for two-dimensional samples in plasma immersion ion implantation

Journal of Applied Physics ◽

10.1063/1.1760833 ◽

2004 ◽

Vol 96 (1) ◽

pp. 934-936 ◽

Author(s):

D. Manova ◽

H. Neumann ◽

S. Mändl ◽

B. Rauschenbach

Keyword(s):

Ion Implantation ◽

Three Dimensional ◽

Two Dimensional ◽

Dimensional Effects ◽

Plasma Immersion Ion Implantation

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