Studies of the effects of the bore length during plasma immersion ion implantation of a small cylindrical bore with auxiliary electrode by two-dimensional fluid model

2002 ◽  
Author(s):  
T.K. Kwok ◽  
X.C. Zeng ◽  
P.K. Chu
Keyword(s):  
Ion Implantation ◽  
Fluid Model ◽  
Two Dimensional ◽  
Auxiliary Electrode ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation

Pulsed sheath dynamics in a small cylindrical bore with an auxiliary electrode for plasma immersion ion implantation

1997 ◽  
Vol 4 (12) ◽  
pp. 4431-4434 ◽  
Author(s):  
X. C. Zeng ◽  
A. G. Liu ◽  
T. K. Kwok ◽  
P. K. Chu ◽  
B. Y. Tang
Keyword(s):  
Ion Implantation ◽  
Auxiliary Electrode ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation

Effects of the auxiliary electrode radius during plasma immersion ion implantation of a small cylindrical bore

1997 ◽  
Vol 71 (8) ◽  
pp. 1035-1037 ◽  
Author(s):  
X. C. Zeng ◽  
T. K. Kwok ◽  
A. G. Liu ◽  
P. K. Chu ◽  
B. Y. Tang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Auxiliary Electrode ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation
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