Two-dimensional particle-in-cell plasma immersion ion implantation simulation of gear/windmill geometry in cylindrical co-ordinates along the (r–θ) plane

2002 ◽  
Vol 156 (1-3) ◽  
pp. 97-102 ◽  
Author(s):  
D.T.K Kwok ◽  
R.K.Y Fu ◽  
P.K Chu
Keyword(s):  
Ion Implantation ◽  
Two Dimensional ◽  
Particle In Cell ◽  
Cell Plasma ◽  
Plasma Immersion Ion Implantation

Two-dimensional particle-in-cell plasma source ion implantation of a prolate spheroid target

2010 ◽  
Vol 19 (3) ◽  
pp. 035201 ◽  
Author(s):  
Liu Cheng-Sen ◽  
Han Hong-Ying ◽  
Peng Xiao-Qing ◽  
Chang Ye ◽  
Wang De-Zhen
Keyword(s):  
Ion Implantation ◽  
Plasma Source ◽  
Prolate Spheroid ◽  
Two Dimensional ◽  
Particle In Cell ◽  
Cell Plasma ◽  
Plasma Source Ion Implantation

Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation

2007 ◽  
Vol 201 (9-11) ◽  
pp. 5458-5462 ◽  
Author(s):  
Y.X. Huang ◽  
X.B. Tian ◽  
S.Q. Yang ◽  
Ricky K.Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Particle In Cell ◽  
Plasma Immersion Ion Implantation ◽  
Uniform Plasma

Two-dimensional texture and sheath evolution in metal plasma immersion ion implantation

2005 ◽  
Vol 200 (1-4) ◽  
pp. 589-593 ◽  
Author(s):  
S. Mändl ◽  
G. Thorwarth ◽  
B. Stritzker ◽  
B. Rauschenbach
Keyword(s):  
Ion Implantation ◽  
Two Dimensional ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation

Investigation of plasma immersion ion implantation of nickel-titanium rod by multiple-grid particle-in-cell simulation

2008 ◽  
Vol 103 (5) ◽  
pp. 053308 ◽  
Author(s):  
Dixon T. K. Kwok ◽  
Shuilin Wu ◽  
Xiangmei Liu ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Ion Implantation ◽  
Nickel Titanium ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Plasma Immersion Ion Implantation
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