Numerical simulation of plasma immersion ion implantation of a finite-length cylindrical bore with auxiliary electrode by two-dimensional fluid model

2002 ◽  
Author(s):  
T.K. Kwok ◽  
T.E. Sheridan ◽  
X.C. Zeng ◽  
P.K. Chu
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Finite Length ◽  
Fluid Model ◽  
Two Dimensional ◽  
Auxiliary Electrode ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation

Pulsed sheath dynamics in a small cylindrical bore with an auxiliary electrode for plasma immersion ion implantation

1997 ◽  
Vol 4 (12) ◽  
pp. 4431-4434 ◽  
Author(s):  
X. C. Zeng ◽  
A. G. Liu ◽  
T. K. Kwok ◽  
P. K. Chu ◽  
B. Y. Tang
Keyword(s):  
Ion Implantation ◽  
Auxiliary Electrode ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation

Effects of the auxiliary electrode radius during plasma immersion ion implantation of a small cylindrical bore

1997 ◽  
Vol 71 (8) ◽  
pp. 1035-1037 ◽  
Author(s):  
X. C. Zeng ◽  
T. K. Kwok ◽  
A. G. Liu ◽  
P. K. Chu ◽  
B. Y. Tang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Auxiliary Electrode ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation

Two-dimensional numerical simulation of non-uniform plasma immersion ion implantation

2004 ◽  
Vol 186 (1-2) ◽  
pp. 47-52 ◽  
Author(s):  
X.B Tian ◽  
S.Q Yang ◽  
Y.X Huang ◽  
C.Z Gong ◽  
G.C Xu ◽  
...  
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Two Dimensional ◽  
Plasma Immersion Ion Implantation ◽  
Uniform Plasma
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