Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation

2007 ◽  
Vol 201 (9-11) ◽  
pp. 5458-5462 ◽  
Author(s):  
Y.X. Huang ◽  
X.B. Tian ◽  
S.Q. Yang ◽  
Ricky K.Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Particle In Cell ◽  
Plasma Immersion Ion Implantation ◽  
Uniform Plasma

Two-dimensional numerical simulation of non-uniform plasma immersion ion implantation

2004 ◽  
Vol 186 (1-2) ◽  
pp. 47-52 ◽  
Author(s):  
X.B Tian ◽  
S.Q Yang ◽  
Y.X Huang ◽  
C.Z Gong ◽  
G.C Xu ◽  
...  
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Two Dimensional ◽  
Plasma Immersion Ion Implantation ◽  
Uniform Plasma

Investigation of plasma immersion ion implantation of nickel-titanium rod by multiple-grid particle-in-cell simulation

2008 ◽  
Vol 103 (5) ◽  
pp. 053308 ◽  
Author(s):  
Dixon T. K. Kwok ◽  
Shuilin Wu ◽  
Xiangmei Liu ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Ion Implantation ◽  
Nickel Titanium ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Plasma Immersion Ion Implantation
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