Structure and mechanical properties of low stress tetrahedral amorphous carbon films prepared by pulsed laser deposition

2002 ◽  
Vol 25 (3) ◽  
pp. 269-280 ◽  
Author(s):  
M. Bonelli ◽  
A.C. Ferrari ◽  
A. Fioravanti ◽  
A. Li Bassi ◽  
A. Miotello ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Pulsed Laser Deposition ◽  
Amorphous Carbon ◽  
Pulsed Laser ◽  
Carbon Films ◽  
Laser Deposition ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

Microstructure and Nanomechanical Properties of Amorphous Carbon Thin Films Prepared by Pulsed Laser Deposition in Various Atmospheres

2000 ◽  
Vol 616 ◽  
Author(s):  
Q. Wei ◽  
S. Yamolenko ◽  
J. Sankar ◽  
A.K. Sharma ◽  
Y. Yamagata ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Amorphous Carbon ◽  
Pulsed Laser ◽  
Carbon Films ◽  
Laser Deposition ◽  
Chamber Pressure ◽  
Amorphous Carbon Films ◽  
Nanomechanical Properties ◽  
Bonding Characteristics

AbstractWe have investigated the effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous diamondlike carbon (DLC) thin films prepared by pulsed laser deposition. The amorphous carbon films were deposited in various atmospheres such as nitrogen and argon at different pressures. We used Raman spectroscopy and optical microscopy to study the bonding characteristics and microstructures of the DLC films. Nanoindentation measurements were carried out on various samples prepared under different conditions to study the effect of chamber pressure and atmosphere on the elastic modulus and nano-hardness of the films. It was found that reduced vacuum leads to softer amorphous carbon films. Amorphous carbon films prepared in higher pressures exhibit increased density of particulates, and significantly rough surface. The results were understood in terms of thermalization of the laser plasma due to increased possibility of collision.

scholarly journals Characterization of amorphous carbon films grown by pulsed-laser deposition

1998 ◽  
Author(s):  
M.P. Siegal ◽  
D.R. Tallant ◽  
J.C. Barbour ◽  
P.N. Provencio ◽  
L.J. Martinez-Miranda ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Amorphous Carbon ◽  
Pulsed Laser ◽  
Carbon Films ◽  
Laser Deposition ◽  
Amorphous Carbon Films

Pulsed laser deposition of diamond‐like amorphous carbon films from graphite and polycarbonate targets

1995 ◽  
Vol 78 (6) ◽  
pp. 4123-4130 ◽  
Author(s):  
A. A. Voevodin ◽  
S. J. P. Laube ◽  
S. D. Walck ◽  
J. S. Solomon ◽  
M. S. Donley ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Amorphous Carbon ◽  
Pulsed Laser ◽  
Carbon Films ◽  
Laser Deposition ◽  
Amorphous Carbon Films
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