Plasma enhanced CVD of fluorocarbon films by low-pressure dielectric barrier discharge
2009 ◽
Vol 203
(9)
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pp. 1231-1236
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2008 ◽
Vol 10
(1)
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pp. 74-77
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2012 ◽
Vol 45
(50)
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pp. 505205
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Keyword(s):
2018 ◽
Vol 27
(10)
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pp. 105003
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Keyword(s):