The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge

2006 ◽  
Vol 515 (4) ◽  
pp. 1522-1526 ◽  
Author(s):  
J. Bohlmark ◽  
M. Lattemann ◽  
J.T. Gudmundsson ◽  
A.P. Ehiasarian ◽  
Y. Aranda Gonzalvo ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Ion Flux ◽  
Energy Distributions ◽  
Ion Energy ◽  
Flux Composition ◽  
Ion Energy Distributions

Ion energy distributions in AZO magnetron sputtering from planar and rotatable magnetrons

2009 ◽  
Vol 204 (6-7) ◽  
pp. 845-849 ◽  
Author(s):  
F. Richter ◽  
T. Welzel ◽  
R. Kleinhempel ◽  
T. Dunger ◽  
T. Knoth ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions

scholarly journals Dependence of Ar+ and Ti+ Ion Energy Distributions on Ar Pressure in Inductively Coupled rf Plasma Enhanced Magnetron Sputtering.

Shinku ◽  
1999 ◽  
Vol 42 (3) ◽  
pp. 413-416
Author(s):  
Suguru SAIKI ◽  
Takayoshi SAITO ◽  
Toshiki KOBAYASHI ◽  
Kazuhiro FUKUSHIMA ◽  
Naoto KIKUCHI ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Rf Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Ion Energy Distributions

scholarly journals Ion Energy Distributions in Magnetron Sputtering of Zinc Aluminium Oxide

2009 ◽  
Vol 6 (S1) ◽  
pp. S331-S336 ◽  
Author(s):  
Thomas Welzel ◽  
Ronny Kleinhempel ◽  
Thoralf Dunger ◽  
Frank Richter
Keyword(s):  
Magnetron Sputtering ◽  
Aluminium Oxide ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions
Sign in / Sign up

Export Citation Format

Share Document