Effect of high substrate bias and hydrogen and nitrogen incorporation on filtered cathodic vacuum arc deposited tetrahedral amorphous carbon films

2008 ◽  
Vol 516 (8) ◽  
pp. 2331-2340 ◽  
Author(s):  
O.S. Panwar ◽  
Mohd. Alim Khan ◽  
Mahesh Kumar ◽  
S.M. Shivaprasad ◽  
B.S. Satyanarayana ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Substrate Bias ◽  
Amorphous Carbon Films ◽  
High Substrate ◽  
Tetrahedral Amorphous Carbon ◽  
Nitrogen Incorporation ◽  
Filtered Cathodic Vacuum Arc

Characterization of Boron- and Phosphorous-Incorporated Tetrahedral Amorphous Carbon Films Deposited by the Filtered Cathodic Vacuum Arc Process

2009 ◽  
Vol 48 (6) ◽  
pp. 065501 ◽  
Author(s):  
Omvir Singh Panwar ◽  
Mohd. Alim Khan ◽  
Mahesh Kumar ◽  
Sonnada Math Shivaprasad ◽  
Bukinakere Subbakrihniah Satyanarayana ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon ◽  
Filtered Cathodic Vacuum Arc
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