Room temperature deposition of Al-doped ZnO films on quartz substrates by radio-frequency magnetron sputtering and effects of thermal annealing

2010 ◽  
Vol 519 (1) ◽  
pp. 31-36 ◽  
Author(s):  
Weifeng Yang ◽  
Zhengyun Wu ◽  
Zhuguang Liu ◽  
Aisuo Pang ◽  
Yu-Li Tu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thermal Annealing ◽  
Room Temperature ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Temperature Deposition ◽  
Doped Zno ◽  
Quartz Substrates

Effects of thickness and annealing on the properties of Ti-doped ZnO films by radio frequency magnetron sputtering

2011 ◽  
Vol 11 (1) ◽  
pp. S185-S190 ◽  
Author(s):  
Hung-Peng Chang ◽  
Fang-Hsing Wang ◽  
Jen-Chi Chao ◽  
Chia-Cheng Huang ◽  
Han-Wen Liu
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Doped Zno

Effect of substrate temperature on F and Al co-doped ZnO films deposited by radio frequency magnetron sputtering

Solar Energy ◽  
2019 ◽  
Vol 194 ◽  
pp. 471-477 ◽  
Author(s):  
Yanfeng Wang ◽  
Jianmin Song ◽  
Jie Zhang ◽  
Guoxi Zheng ◽  
Xiaochen Duan ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Doped Zno ◽  
Co Doped
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