Al-doped ZnO films deposited on a slightly reduced buffer layer by reactive dc unbalanced magnetron sputtering

2014 ◽  
Vol 555 ◽  
pp. 93-99 ◽  
Author(s):  
Minehide Kusayanagi ◽  
Azusa Uchida ◽  
Nobuto Oka ◽  
Junjun Jia ◽  
Shin-ichi Nakamura ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Zno Films ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Doped Zno

Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

2013 ◽  
Vol 27 (10) ◽  
pp. 1112-1116 ◽  
Author(s):  
Ke-Wei SUN ◽  
Wan-Cheng ZHOU ◽  
Shan-Shan HUANG ◽  
Xiu-Feng TANG
Keyword(s):  
Magnetron Sputtering ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno ◽  
Sputtering Pressure

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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