Reactive radio frequency sputtering deposition and characterization of zinc nitride and oxynitride thin films

2012 ◽  
Vol 520 (6) ◽  
pp. 1698-1704 ◽  
Author(s):  
Nanke Jiang ◽  
Daniel G. Georgiev ◽  
Ting Wen ◽  
Ahalapitiya H. Jayatissa
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Sputtering Deposition ◽  
Radio Frequency Sputtering ◽  
Zinc Nitride

Optical properties of Mn-Co-Ni-O thin films prepared by radio frequency sputtering deposition

2014 ◽  
Vol 115 (9) ◽  
pp. 093512 ◽  
Author(s):  
Wei Zhou ◽  
Jing Wu ◽  
Cheng Ouyang ◽  
Yanqing Gao ◽  
Xiaofeng Xu ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Radio Frequency ◽  
Sputtering Deposition ◽  
Radio Frequency Sputtering

Radio frequency dual magnetron sputtering deposition and characterization of nanocomposite Al2O3–ZrO2 thin films

2006 ◽  
Vol 24 (2) ◽  
pp. 309-316 ◽  
Author(s):  
D. H. Trinh ◽  
H. Högberg ◽  
J. M. Andersson ◽  
M. Collin ◽  
I. Reineck ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Sputtering Deposition

Growth and optical characterization of aluminum nitride thin films deposited on silicon by radio-frequency sputtering

1999 ◽  
Vol 74 (9) ◽  
pp. 1209-1211 ◽  
Author(s):  
E. Dogheche ◽  
D. Rémiens ◽  
A. Boudrioua ◽  
J. C. Loulergue
Keyword(s):  
Thin Films ◽  
Aluminum Nitride ◽  
Radio Frequency ◽  
Optical Characterization ◽  
Radio Frequency Sputtering

Preparation and Characterization of TiO2 Photocatalyst Thin Films Using Radio Frequency Sputtering

2016 ◽  
Vol 13 (1) ◽  
pp. 982-988 ◽  
Author(s):  
P. C Huang ◽  
C. C Sung ◽  
A. H Chiou ◽  
J. Y Kao ◽  
C. Y Hsu
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Tio2 Photocatalyst ◽  
Radio Frequency Sputtering

Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn2SnO4, thin films

2002 ◽  
Vol 92 (1) ◽  
pp. 310-319 ◽  
Author(s):  
David L. Young ◽  
Helio Moutinho ◽  
Yanfa Yan ◽  
Timothy J. Coutts
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zinc Stannate ◽  
Magnetron Sputter ◽  
Sputter Deposited
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