radio frequency sputtering
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2021 ◽  
Vol 88 (6) ◽  
pp. 881-886
Author(s):  
O. M. Bordun ◽  
I. O. Bordun ◽  
I. M. Kofliuk ◽  
I. Yo. Kukharskyy ◽  
I. I. Medvid

The long-wavelength edge of the fundamental absorption band of thin Y2O3 films obtained by radiofrequency ion-plasma sputtering is investigated. The edge of interband absorption after annealing of the films in an atmosphere of argon, oxygen, or a mixture of these gases is shown to be approximated well by the Urbach empirical rule. Diffractograms of the obtained films were studied and a model of a heavily doped or defective semiconductor in the quasi-classical approximation was used to analyze the experimental results. This model allows determining the radius of the basic electronic state, the screening radius, and the rootmean-square potential depending on the sputtering atmosphere.


Materials ◽  
2021 ◽  
Vol 14 (19) ◽  
pp. 5826
Author(s):  
Nunzia Coppola ◽  
Pierpaolo Polverino ◽  
Giovanni Carapella ◽  
Regina Ciancio ◽  
Piu Rajak ◽  
...  

We investigate the influence of position, under large circular sputtering targets, on the final electrochemical performance of 35 mm diameter button solid oxide fuel cells with sputter-deposited Gadolinium doped Ceria barrier layers, positioned in order to almost cover the entirety of the area associated with a 120 × 80 mm2 industrial cell. We compare the results obtained via structural and morphological analysis to the Electrochemical Impedance Spectroscopy (EIS) measurements performed on the button cells, disentangling the role of different parameters. The Atomic Force Microscopy analysis makes it possible to observe a decrease in the roughness values from the peripheral to the central zones under the sputtering target, with peak-to-valley roughness values, respectively, decreasing from 380 nm to 300 nm, while Scanning Electron Microscopy and Energy Dispersive Spectroscopy show a dependence of the layer coverage from the position. The electrochemical performances of button cells with buffer layers of only 200 nm in thickness, and with negligible thickness gradients across them, show current density values of up to 478 mA/cm2 at 0.8 V and 650 °C, with an improvement of more than 67% with respect to button cells with standard (screen printed) buffer layers. These results point out the major influence exerted by parameters such as the thickness gradient and the coverage of the sputtered buffer layers in determining the final electrochemical performances.


2021 ◽  
pp. 138951
Author(s):  
Daniela De Luca ◽  
Emiliano Di Gennaro ◽  
Davide De Maio ◽  
Carmine D’Alessandro ◽  
Antonio Caldarelli ◽  
...  

Energies ◽  
2021 ◽  
Vol 14 (15) ◽  
pp. 4696
Author(s):  
Jung-Chuan Chou ◽  
Tsu-Yang Lai ◽  
Yu-Hsun Nien ◽  
Chih-Hsien Lai ◽  
Po-Yu Kuo ◽  
...  

How to detect uric acid is an important issue. For the purpose of preparing a potentiometric uric acid biosensor, this research used nickel oxide (NiO) as the sensing film to deposit it onto the substrate by radio frequency sputtering, then modified it with reduced graphene oxide (rGO) and silver (Ag) nanowires. Reduced graphene oxide (rGO) not only has excellent electrical conductivity, but also can make the surface of the film have a larger surface area, while AgNWs have also been proven to improve catalytic activity; hence, these two materials were chosen as sensor modifiers. Finally, the stability and the various characteristics of the uric acid biosensor were investigated using a voltage–time (V–T) system. The results showed that the AgNW–uricase/rGO/NiO uric acid biosensor has average sensitivity with 4.66 mV/(mg/L). In addition, the sensor has good stability.


2021 ◽  
Vol 13 (7) ◽  
pp. 1318-1323
Author(s):  
Myeong-Cheol Shin ◽  
Dong-Hyeon Kim ◽  
Seong-Woo Jung ◽  
Michael A. Schweitz ◽  
Sang-Mo Koo

ABSTRACTThis study report on the formation of AlN/SiC heterostructure Schottky diodes for use of temperature sensing applications enhance the sensitivity. We analyzed the sensitivity of the AlN/SiC Schottky diode sensor depending on the annealing temperature. AlN/4H-SiC Schottky diodes were fabricated by depositing aluminum nitride (AlN) thin film on 4H/SiC by radio frequency sputtering. The forward bias electrical characteristics were determined under DC bias (in the voltage range of 0–1.5 V). The ideality factor, barrier height, and sensitivity were derived through current–voltage–temperature (I–V–T) measurements in the temperature range of 300–500 K. The sensitivity of the AlN/4H-SiC Schottky barrier diode ranged from 2.5–5.0 mV/K.


Author(s):  
Keh-Moh Lin ◽  
Swapnil Shinde ◽  
Ru-Li Lin ◽  
Wen-Tse Hsiao ◽  
Pankaj Koinkar

In this study, indium-zinc oxide (IZO)/silver (Ag)/IZO (ZAZ) flexible transparent electrodes were prepared on polyethylene terephthalate substrate using radio frequency sputtering technique. Experimental results showed that when the Ag film transited from semi-continuous state to continuous state, the ZAZ electrode exhibited high optoelectronic performance. The best ZAZ sample had a quite wide range of high transmittance and an average transmittance of 78.9% in visible light region, and sheet resistance of [Formula: see text]/sq and a Haacke Index of [Formula: see text]. The bending test revealed that the [Formula: see text] (change in sheet resistance) of ZAZ electrodes after 1000 bends was still less than 25% while the electrical properties of IZO films deteriorated after only 100 bending tests.


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