Spectra characterization of silicon carbonitride thin films by reactive radio frequency sputtering

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1431952 ◽

2002 ◽

Vol 20 (1) ◽

pp. 159 ◽

Author(s):

Xiaofeng Peng ◽

Lixin Song ◽

Jun Le ◽

Xingfang Hu

Keyword(s):

Radio Frequency ◽

Silicon Carbonitride ◽

Radio Frequency Sputtering

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Deposition and characterization of PbTiO3 thin films grown by radio frequency sputtering on MgO(100)

Thin Solid Films ◽

10.1016/0040-6090(96)80025-3 ◽

1995 ◽

Vol 266 (2) ◽

pp. 205-211 ◽

Author(s):

Sangsub Kirn ◽

Sunggi Baik

Keyword(s):

Radio Frequency ◽

Radio Frequency Sputtering

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Surface- and microanalytical characterization of silicon-carbonitride thin films prepared by means of radio-frequency magnetron co-sputtering

Thin Solid Films ◽

10.1016/s0040-6090(98)01061-x ◽

1998 ◽

Vol 332 (1-2) ◽

pp. 230-234 ◽

Author(s):

H. Lutz ◽

M. Bruns ◽

F. Link ◽

H. Baumann

Keyword(s):

Radio Frequency ◽

Radio Frequency Magnetron ◽

Silicon Carbonitride

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Reactive radio frequency sputtering deposition and characterization of zinc nitride and oxynitride thin films

Thin Solid Films ◽

10.1016/j.tsf.2011.08.038 ◽

2012 ◽

Vol 520 (6) ◽

pp. 1698-1704 ◽

Author(s):

Nanke Jiang ◽

Daniel G. Georgiev ◽

Ting Wen ◽

Ahalapitiya H. Jayatissa

Keyword(s):

Radio Frequency ◽

Sputtering Deposition ◽

Radio Frequency Sputtering ◽

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Growth and optical characterization of aluminum nitride thin films deposited on silicon by radio-frequency sputtering

Applied Physics Letters ◽

10.1063/1.123501 ◽

1999 ◽

Vol 74 (9) ◽

pp. 1209-1211 ◽

Author(s):

E. Dogheche ◽

D. Rémiens ◽

A. Boudrioua ◽

J. C. Loulergue

Keyword(s):

Aluminum Nitride ◽

Radio Frequency ◽

Optical Characterization ◽

Radio Frequency Sputtering

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Preparation and Characterization of TiO2 Photocatalyst Thin Films Using Radio Frequency Sputtering

Journal of Computational and Theoretical Nanoscience ◽

10.1166/jctn.2016.4902 ◽

2016 ◽

Vol 13 (1) ◽

pp. 982-988 ◽

Author(s):

P. C Huang ◽

C. C Sung ◽

A. H Chiou ◽

J. Y Kao ◽

C. Y Hsu

Keyword(s):

Radio Frequency ◽

Tio2 Photocatalyst ◽

Radio Frequency Sputtering

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Microstructural characterization of MgO thin films grown by radio-frequency sputtering. Target and substrate-temperature effect

Journal of Applied Physics ◽

10.1063/1.1558964 ◽

2003 ◽

Vol 93 (7) ◽

pp. 4300-4305 ◽

Author(s):

D. Cáceres ◽

I. Vergara ◽

R. González

Keyword(s):

Substrate Temperature ◽

Radio Frequency ◽

Temperature Effect ◽

Microstructural Characterization ◽

Radio Frequency Sputtering

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Characterization of Eu-Doped SnO[sub 2] Thin Films Deposited by Radio-Frequency Sputtering for a Transparent Conductive Phosphor Layer

Journal of The Electrochemical Society ◽

10.1149/1.2167953 ◽

2006 ◽

Vol 153 (4) ◽

pp. H63 ◽

Author(s):

Do Hyung Park ◽

Yang Hwi Cho ◽

Young Rag Do ◽

Byung Tae Ahn

Keyword(s):

Radio Frequency ◽

Phosphor Layer ◽

Radio Frequency Sputtering

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Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn2SnO4, thin films

Journal of Applied Physics ◽

10.1063/1.1483104 ◽

2002 ◽

Vol 92 (1) ◽

pp. 310-319 ◽

Author(s):

David L. Young ◽

Helio Moutinho ◽

Yanfa Yan ◽

Timothy J. Coutts

Keyword(s):

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zinc Stannate ◽

Magnetron Sputter ◽

Sputter Deposited

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Magnetron radio frequency sputtering growth of LaNi5 thin films and their hydrogen-sensitive properties at room temperature and ordinary pressure

Applied Surface Science ◽

10.1016/j.apsusc.2015.01.051 ◽

2015 ◽

Vol 331 ◽

pp. 35-40 ◽

Author(s):

Han Tian ◽

Kansong Chen ◽

Huarong Liu ◽

Kun Xie ◽

Haoshuang Gu

Keyword(s):

Radio Frequency ◽

Room Temperature ◽

Radio Frequency Sputtering

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Specific features of the formation of Ba x Sr1 − x TiO3 ferroelectric thin films on different substrates by radio-frequency sputtering

Physics of the Solid State ◽

10.1134/s1063783409070026 ◽

2009 ◽

Vol 51 (7) ◽

pp. 1328-1331 ◽

Author(s):

M. S. Ivanov ◽

M. S. Afanas’ev

Keyword(s):

Radio Frequency ◽

Ferroelectric Thin Films ◽

Radio Frequency Sputtering

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