Low temperature catalyst enhanced etch process with high etch rate selectivity for amorphous silicon based alloys over single-crystalline silicon based alloys

Single Crystalline ◽

High Etch Rate ◽

Characterization of low-temperature processed single-crystalline silicon thin-film transistor on glass

IEEE Electron Device Letters ◽

10.1109/led.2003.815945 ◽

2003 ◽

Vol 24 (9) ◽

pp. 574-576 ◽

Cited By ~ 11

Author(s):

Xuejie Shi ◽

K. Henttinen ◽

T. Suni ◽

I. Suni ◽

S.S. Lau ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Crystalline Silicon ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

Single Crystalline

Single-Crystalline Silicon-Based Heterojunction Photodiode Arrays on Flexible Plastic Substrates

IEEE Transactions on Electron Devices ◽

10.1109/ted.2011.2162241 ◽

2011 ◽

Vol 58 (10) ◽

pp. 3329-3334 ◽

Cited By ~ 3

Author(s):

Sangwook Lee ◽

Juree Hong ◽

Ja Hoon Koo ◽

Seulah Lee ◽

Kwanghyun Lee ◽

...

Keyword(s):

Crystalline Silicon ◽

Single Crystalline ◽

Plastic Substrates ◽

Photodiode Arrays ◽

Low-Temperature Epitaxial Growth of Single Crystalline Silicon from Silane

Journal of The Electrochemical Society ◽

10.1149/1.2412092 ◽

1969 ◽

Vol 116 (6) ◽

pp. 872 ◽

Cited By ~ 18

Author(s):

David Richman ◽

Robert H. Arlett

Keyword(s):

Low Temperature ◽

Epitaxial Growth ◽

Crystalline Silicon ◽

Single Crystalline

Single crystalline silicon based surface micromachining for high precision inertial sensors: technology and design for reliability

Microsystem Technologies ◽

10.1007/s00542-010-1062-4 ◽

2010 ◽

Vol 16 (5) ◽

pp. 885-893 ◽

Cited By ~ 4

Author(s):

R. Knechtel

Keyword(s):

High Precision ◽

Inertial Sensors ◽

Crystalline Silicon ◽

Surface Micromachining ◽

Single Crystalline ◽

Design For Reliability ◽

Silicon Based ◽

Technology And Design

A New Low-Cost and Low-Temperature Chemical Passivation Process for Large Area Industrial Single Crystalline Silicon Wafers

2017 IEEE 44th Photovoltaic Specialist Conference (PVSC) ◽

10.1109/pvsc.2017.8366672 ◽

2017 ◽

Cited By ~ 2

Author(s):

Tarun S. Yadav ◽

K. Sandeep ◽

Ashok K. Sharma ◽

B. Spandana ◽

K.L. Narasimhan ◽

...

Keyword(s):

Low Temperature ◽

Crystalline Silicon ◽

Low Cost ◽

Silicon Wafers ◽

Large Area ◽

Single Crystalline ◽

Passivation Process ◽

Chemical Passivation

Low-cost and low-temperature chemical oxide passivation process for large area single crystalline silicon solar cells

Solar Energy ◽

10.1016/j.solener.2018.04.008 ◽

2018 ◽

Vol 169 ◽

pp. 270-276 ◽

Cited By ~ 2

Author(s):

Tarun Singh Yadav ◽

Ashok Kumar Sharma ◽

Anil Kottantharayil ◽

Prabir Kanti Basu

Keyword(s):

Solar Cells ◽

Low Temperature ◽

Crystalline Silicon ◽

Low Cost ◽

Silicon Solar Cells ◽

Large Area ◽

Single Crystalline ◽

Crystalline Silicon Solar Cells ◽

Passivation Process

Single crystalline silicon-based surface micromachining for high-precision inertial sensors: technology and design for reliability

10.1117/12.821643 ◽

2009 ◽

Author(s):

Roy Knechtel

Keyword(s):

High Precision ◽

Inertial Sensors ◽

Crystalline Silicon ◽

Surface Micromachining ◽

Single Crystalline ◽

Design For Reliability ◽

Silicon Based ◽

Technology And Design

Phosphorus gettering of precipitated Cu in single crystalline silicon based on rapid thermal process

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2010.07.036 ◽

2010 ◽

Vol 312 (21) ◽

pp. 3069-3074 ◽

Cited By ~ 3

Author(s):

Xiaoqiang Li ◽

Deren Yang ◽

Xuegong Yu ◽

Duanlin Que

Keyword(s):

Thermal Process ◽

Crystalline Silicon ◽

Rapid Thermal Process ◽

Single Crystalline ◽

Surface Passivation of Single Crystalline Silicon by Thin Amorphous Silicon Layers

MRS Proceedings ◽

10.1557/proc-315-429 ◽

1993 ◽

Vol 315 ◽

Cited By ~ 2

Author(s):

C. Swiatkowski ◽

A. Sanders ◽

H.-C. Neitzert ◽

M. Kuns

Keyword(s):

Amorphous Silicon ◽

Surface Passivation ◽

Crystalline Silicon ◽

Single Crystalline

Indium phosphide nanowire photoconductors on non-single crystalline silicon-based platform

2007 7th IEEE Conference on Nanotechnology (IEEE NANO) ◽

10.1109/nano.2007.4601233 ◽

2007 ◽

Author(s):

Nobuhiko P. Kobayashi ◽

V.J. Logeeswaran ◽

Xuema Li ◽

M. Saif Islam ◽

Joseph Straznicky ◽

...

Keyword(s):

Indium Phosphide ◽

Crystalline Silicon ◽

Single Crystalline ◽