Synthesis of diamond-like carbon films on Si substrates by photoemission-assisted plasma-enhanced chemical vapor deposition
Keyword(s):
2010 ◽
Vol 42
(12-13)
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pp. 1702-1705
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Keyword(s):
2013 ◽
Vol 52
(11R)
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pp. 110123
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Keyword(s):
2013 ◽
Vol 264
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pp. 625-632
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Keyword(s):
2000 ◽
Vol 9
(12)
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pp. 2024-2030
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2010 ◽
Vol 49
(7)
◽
pp. 075501
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1994 ◽
Vol 4
(1)
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pp. 69-75
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Keyword(s):
Keyword(s):
2006 ◽
Vol 72
(10)
◽
pp. 1237-1241