Structure and Mechanical Properties of Diamond-Like Carbon Films Prepared from C2H2and H2Mixtures by Pulse Plasma Chemical Vapor Deposition

2010 ◽  
Vol 49 (7) ◽  
pp. 075501 ◽  
Author(s):  
Shinji Fujimoto ◽  
Hiroki Akasaka ◽  
Tsuneo Suzuki ◽  
Naoto Ohtake ◽  
Osamu Takai
Keyword(s):  
Mechanical Properties ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Pulse Plasma ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

Synthesis of Diamond-Like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition in Open Air

2005 ◽  
Vol 44 (No. 52) ◽  
pp. L1573-L1575 ◽  
Author(s):  
Yoshimasa Kondo ◽  
Takao Saito ◽  
Tatsuya Terazawa ◽  
Masanori Saito ◽  
Naoto Ohtake
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition
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