Compositionally tunable optical properties of hafnium titanium oxide films deposited by atomic layer deposition without intermediate surface hydroxylation

2017 ◽  
Vol 642 ◽  
pp. 103-109 ◽  
Author(s):  
M.S. Lebedev ◽  
V.N. Kruchinin ◽  
M.I. Lebedeva ◽  
E.V. Spesivtsev
Keyword(s):  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Tunable Optical Properties ◽  
Surface Hydroxylation ◽  
Intermediate Surface ◽  
Titanium Oxide Films

scholarly journals Atomic layer deposition of titanium oxide films on As-synthesized magnetic Ni particles: Magnetic and safety properties

2017 ◽  
Vol 429 ◽  
pp. 299-304 ◽  
Author(s):  
Peep Uudeküll ◽  
Jekaterina Kozlova ◽  
Hugo Mändar ◽  
Joosep Link ◽  
Mariliis Sihtmäe ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Safety Properties ◽  
Layer Deposition ◽  
Titanium Oxide Films

Effect of substrate-enhanced and inhibited growth on atomic layer deposition and properties of aluminum–titanium oxide films

2016 ◽  
Vol 600 ◽  
pp. 119-125 ◽  
Author(s):  
Tõnis Arroval ◽  
Lauri Aarik ◽  
Raul Rammula ◽  
Vegard Kruusla ◽  
Jaan Aarik
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Titanium Oxide Films

Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates

2008 ◽  
Vol 516 (15) ◽  
pp. 4855-4862 ◽  
Author(s):  
Indrek Jõgi ◽  
Martti Pärs ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Matti Laan ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Silicon Substrates ◽  
Layer Deposition ◽  
Titanium Oxide Films

scholarly journals W:Al2O3 Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition

2016 ◽  
Vol 120 (27) ◽  
pp. 14681-14689 ◽  
Author(s):  
Shaista Babar ◽  
Anil U. Mane ◽  
Angel Yanguas-Gil ◽  
Elham Mohimi ◽  
Richard T. Haasch ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Nanocomposite Thin Films ◽  
Tunable Optical Properties

scholarly journals Tunable optical properties in atomic layer deposition grown ZnO thin films

2017 ◽  
Vol 35 (1) ◽  
pp. 01B108 ◽  
Author(s):  
Dipayan Pal ◽  
Aakash Mathur ◽  
Ajaib Singh ◽  
Jaya Singhal ◽  
Amartya Sengupta ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Layer Deposition ◽  
Tunable Optical Properties

scholarly journals Morphology-controlled MoS2 by low-temperature atomic layer deposition

Nanoscale ◽  
2020 ◽  
Vol 12 (39) ◽  
pp. 20404-20412
Author(s):  
Chengxu Shen ◽  
Muhammad Hamid Raza ◽  
Patrick Amsalem ◽  
Thorsten Schultz ◽  
Norbert Koch ◽  
...  
Keyword(s):  
Optical Properties ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Tunable Optical Properties

Morphologies-controlled MoS2 deposited by low temperature ALD exhibit tunable optical properties.

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