scholarly journals Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition

2021 ◽  
pp. 138758
Author(s):  
Oili M.E. Ylivaara ◽  
Andreas Langner ◽  
Xuwen Liu ◽  
Dieter Schneider ◽  
Jaakko Julin ◽  
...  
Keyword(s):  
Titanium Dioxide ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Titanium Tetrachloride ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals W:Al2O3 Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition

2016 ◽  
Vol 120 (27) ◽  
pp. 14681-14689 ◽  
Author(s):  
Shaista Babar ◽  
Anil U. Mane ◽  
Angel Yanguas-Gil ◽  
Elham Mohimi ◽  
Richard T. Haasch ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Nanocomposite Thin Films ◽  
Tunable Optical Properties

Atomic layer deposition of titanium dioxide thin films from tetraethoxytitanium and water

2010 ◽  
Vol 4 (3) ◽  
pp. 379-383 ◽  
Author(s):  
A. P. Alekhin ◽  
G. I. Lapushkin ◽  
A. M. Markeev ◽  
A. A. Sigarev ◽  
V. F. Toknova
Keyword(s):  
Thin Films ◽  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Titanium Dioxide Thin Films

Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide

2014 ◽  
Vol 32 (1) ◽  
pp. 01A114 ◽  
Author(s):  
Virginia R. Anderson ◽  
Andrew S. Cavanagh ◽  
Aziz I. Abdulagatov ◽  
Zachary M. Gibbs ◽  
Steven M. George
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Tetrachloride ◽  
Atomic Layer ◽  
Titanium Tetraisopropoxide ◽  
Layer Deposition

Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide

2014 ◽  
Vol 26 (2) ◽  
pp. 024003 ◽  
Author(s):  
Stephan Ratzsch ◽  
Ernst-Bernhard Kley ◽  
Andreas Tünnermann ◽  
Adriana Szeghalmi
Keyword(s):  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Oxygen Plasma ◽  
Atomic Layer ◽  
Plasma Parameters ◽  
Layer Deposition

Optical properties of crystalline Al203 thin films grown by atomic layer deposition

2005 ◽  
Author(s):  
Jaan Aarik ◽  
Aarne Kasikov ◽  
Marco Kirm ◽  
Sven Lange ◽  
Teet Uustare ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Novel Antimicrobial Titanium Dioxide Nanotubes Obtained through a Combination of Atomic Layer Deposition and Electrospinning Technologies

Nanomaterials ◽  
2018 ◽  
Vol 8 (2) ◽  
pp. 128 ◽  
Author(s):  
Carol López de Dicastillo ◽  
Cristian Patiño ◽  
María Galotto ◽  
Juan Palma ◽  
Daniela Alburquenque ◽  
...  
Keyword(s):  
Titanium Dioxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Titanium Dioxide Nanotubes ◽  
Layer Deposition
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