Optical properties and laser-induced breakdown spectroscopy analysis of Al- or Co-doped CuO thin films prepared on glass by radio-frequency magnetron sputtering

2021 ◽  
Vol 722 ◽  
pp. 138572
Author(s):  
Jiasen Wu ◽  
Qing Gao ◽  
Gongxiang Wei ◽  
Junshan Xiu ◽  
Zhao Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Laser Induced Breakdown Spectroscopy ◽  
Radio Frequency Magnetron Sputtering ◽  
Spectroscopy Analysis ◽  
Breakdown Spectroscopy ◽  
Laser Induced Breakdown ◽  
Co Doped

Effect of deposition pressure on the structural and optical properties of Ga2O3films obtained by thermal post-crystallization

CrystEngComm ◽  
2018 ◽  
Vol 20 (1) ◽  
pp. 133-139 ◽  
Author(s):  
Yikai Liao ◽  
Shujie Jiao ◽  
Shaofang Li ◽  
Jinzhong Wang ◽  
Dongbo Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thermal Annealing ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Structural And Optical Properties ◽  
Deposition Pressure ◽  
Amorphous Thin Films

β-Ga2O3films have been obtained by thermal annealing of amorphous thin films that were deposited by radio frequency magnetron sputtering.

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