Growth and characterization of NiWO nanorod films prepared by reactive magnetron co-sputtering with oblique angle deposition

Vacuum ◽  
2021 ◽  
pp. 110777
Author(s):  
Chanthawut Jetjamnong ◽  
Sutharat Chotikaprakhan ◽  
Rattanachai Kowong ◽  
Chanunthorn Chananonnawathorn ◽  
Atipong Bootchanont ◽  
...  
Keyword(s):  
Oblique Angle Deposition ◽  
Reactive Magnetron ◽  
Oblique Angle ◽  
Angle Deposition

Oblique angle deposition of nanocolumnar TiZrN films via reactive magnetron co-sputtering technique: The influence of the Zr target powers

2019 ◽  
Vol 19 (8) ◽  
pp. 894-901 ◽  
Author(s):  
W. Phae-ngam ◽  
M. Horprathum ◽  
C. Chananonnawathorn ◽  
T. Lertvanithphol ◽  
B. Samransuksamer ◽  
...  
Keyword(s):  
Oblique Angle Deposition ◽  
Reactive Magnetron ◽  
Oblique Angle ◽  
Angle Deposition

Preparation and Characterization of ITO Nanostructure by Oblique Angle Deposition

2017 ◽  
Vol 4 (5) ◽  
pp. 6284-6288 ◽  
Author(s):  
P. Nuchuay ◽  
T. Chaikeeree ◽  
N. Kasayapanand ◽  
N. Mungkung ◽  
S. Arunrungrusmi ◽  
...  
Keyword(s):  
Oblique Angle Deposition ◽  
Oblique Angle ◽  
Angle Deposition

Generalized ellipsometry characterization of Ag nanorod arrays prepared by oblique angle deposition

2019 ◽  
Vol 31 (7) ◽  
pp. 075705
Author(s):  
Bilin Ge ◽  
Steven Larson ◽  
Huatian Tu ◽  
Yiping Zhao ◽  
Yiyan Fei
Keyword(s):  
Oblique Angle Deposition ◽  
Nanorod Arrays ◽  
Oblique Angle ◽  
Angle Deposition

Solid-State Dewetting of Gold on Stochastically Periodic SiO2 Nanocolumns Prepared by Oblique Angle Deposition

2021 ◽  
Author(s):  
Manuel Oliva-Ramírez ◽  
Dong Wang ◽  
Dominik Flock ◽  
Víctor Rico ◽  
Agustín R. González-Elipe ◽  
...  
Keyword(s):  
Solid State ◽  
Oblique Angle Deposition ◽  
Oblique Angle ◽  
Angle Deposition

Effects of sputtering power and pressure on properties of ZnO:Ga thin films prepared by oblique-angle deposition

2011 ◽  
Vol 520 (4) ◽  
pp. 1233-1237 ◽  
Author(s):  
S. Flickyngerová ◽  
M. Netrvalová ◽  
P. Šutta ◽  
I. Novotný ◽  
V. Tvarožek ◽  
...  
Keyword(s):  
Thin Films ◽  
Oblique Angle Deposition ◽  
Oblique Angle ◽  
Sputtering Power ◽  
Angle Deposition
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