Fabrication of silicon-on-insulator structure with Si3N4 as buried insulating films by epitaxial layer transfer
2002 ◽
Vol 245
(3-4)
◽
pp. 207-211
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2003 ◽
Vol 336
(3-4)
◽
pp. 344-348
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2001 ◽
Vol 18
(5)
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pp. 662-664
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Keyword(s):
2010 ◽
Vol 157
(1)
◽
pp. H81
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2004 ◽
Vol 5
(4)
◽
pp. 143-147