Effect of the oxygen partial pressure on the properties of ZnO thin films grown by metalorganic vapor phase epitaxy

2003 ◽  
Vol 255 (3-4) ◽  
pp. 303-307 ◽  
Author(s):  
Y Ma ◽  
G.T Du ◽  
T.P Yang ◽  
D.L Qiu ◽  
X Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Zno Thin Films

Evolution and growth of ZnO thin films on GaN(0001) epilayers via metalorganic vapor phase epitaxy

2003 ◽  
Vol 257 (3-4) ◽  
pp. 255-262 ◽  
Author(s):  
T.P. Smith ◽  
W.J. Mecouch ◽  
P.Q. Miraglia ◽  
A.M. Roskowski ◽  
P.J. Hartlieb ◽  
...  
Keyword(s):  
Thin Films ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Zno Thin Films

Control of conductivity type in undoped ZnO thin films grown by metalorganic vapor phase epitaxy

2004 ◽  
Vol 95 (11) ◽  
pp. 6268-6272 ◽  
Author(s):  
Y. Ma ◽  
G. T. Du ◽  
S. R. Yang ◽  
Z. T. Li ◽  
B. J. Zhao ◽  
...  
Keyword(s):  
Thin Films ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Zno Thin Films ◽  
Conductivity Type

Preparation of intrinsic and N-doped p-type ZnO thin films by metalorganic vapor phase epitaxy

2005 ◽  
Vol 87 (21) ◽  
pp. 213103 ◽  
Author(s):  
Guotong Du ◽  
Yan Ma ◽  
Yuantao Zhang ◽  
Tianpeng Yang
Keyword(s):  
Thin Films ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Zno Thin Films ◽  
P Type

Residual and intentional n-type doping of ZnO thin films grown by metal-organic vapor phase epitaxy on sapphire and ZnO substrates

2014 ◽  
Vol 115 (11) ◽  
pp. 113508 ◽  
Author(s):  
Stéphane Brochen ◽  
Matthieu Lafossas ◽  
Ivan-Christophe Robin ◽  
Pierre Ferret ◽  
Frédérique Gemain ◽  
...  
Keyword(s):  
Thin Films ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Zno Thin Films ◽  
Organic Vapor ◽  
Metal Organic
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