Rough growth fronts of evaporated gold films, compared with self-affine and mound growth models

2001 ◽  
Vol 482-485 ◽  
pp. 935-939 ◽  
Author(s):  
M. Aguilar ◽  
E. Anguiano ◽  
J.A. Aznárez ◽  
J.L. Sacedón
Author(s):  
R. H. Morriss ◽  
J. D. C. Peng ◽  
C. D. Melvin

Although dynamical diffraction theory was modified for electrons by Bethe in 1928, relatively few calculations have been carried out because of computational difficulties. Even fewer attempts have been made to correlate experimental data with theoretical calculations. The experimental conditions are indeed stringent - not only is a knowledge of crystal perfection, morphology, and orientation necessary, but other factors such as specimen contamination are important and must be carefully controlled. The experimental method of fine-focus convergent-beam electron diffraction has been successfully applied by Goodman and Lehmpfuhl to single crystals of MgO containing light atoms and more recently by Lynch to single crystalline (111) gold films which contain heavy atoms. In both experiments intensity distributions were calculated using the multislice method of n-beam diffraction theory. In order to obtain reasonable accuracy Lynch found it necessary to include 139 beams in the calculations for gold with all but 43 corresponding to beams out of the [111] zone.


Author(s):  
Joseph D. C. Peng

The relative intensities of the ED spots in a cross-grating pattern can be calculated using N-beam electron diffraction theory. The scattering matrix formulation of N-beam ED theory has been previously applied to imperfect microcrystals of gold containing stacking disorder (coherent twinning) in the (111) crystal plane. In the present experiment an effort has been made to grow single-crystalline, defect-free (111) gold films of a uniform and accurately know thickness using vacuum evaporation techniques. These represent stringent conditions to be met experimentally; however, if a meaningful comparison is to be made between theory and experiment, these factors must be carefully controlled. It is well-known that crystal morphology, perfection, and orientation each have pronounced effects on relative intensities in single crystals.The double evaporation method first suggested by Pashley was employed with some modifications. Oriented silver films of a thickness of about 1500Å were first grown by vacuum evaporation on freshly cleaved mica, with the substrate temperature at 285° C during evaporation with the deposition rate at 500-800Å/sec.


Author(s):  
R. W. Vook ◽  
R. Cook ◽  
R. Ziemer

During recent experiments on Au films, a qualitative correlation between hole formation and deposition rate was observed. These early studies were concerned with films 80 to 1000A thick deposited on glass at -185°C and annealed at 170°C. In the present studies this earlier work was made quantitative. Deposition rates varying between 5 and 700 A/min were used. The effects of deposition rate on hole density for two films 300 and 700A thick were investigated.Au was evaporated from an outgassed W filament located 10 cm from a glass microscope slide substrate and a quartz crystal film thickness monitor. A shutter separating the filament from the substrate and monitor made it possible to obtain a constant evaporation rate before initiating deposition. The pressure was reduced to less than 1 x 10-6 torr prior to cooling the substrate with liquid nitrogen. The substrate was cooled in 15 minutes during which the pressure continued to drop to the mid 10-7 torr range, where deposition was begun.


Author(s):  
Jin Young Kim ◽  
R. E. Hummel ◽  
R. T. DeHoff

Gold thin film metallizations in microelectronic circuits have a distinct advantage over those consisting of aluminum because they are less susceptible to electromigration. When electromigration is no longer the principal failure mechanism, other failure mechanisms caused by d.c. stressing might become important. In gold thin-film metallizations, grain boundary grooving is the principal failure mechanism.Previous studies have shown that grain boundary grooving in gold films can be prevented by an indium underlay between the substrate and gold. The beneficial effect of the In/Au composite film is mainly due to roughening of the surface of the gold films, redistribution of indium on the gold films and formation of In2O3 on the free surface and along the grain boundaries of the gold films during air annealing.


Author(s):  
William Krakow ◽  
David A. Smith

Recent developments in specimen preparation, imaging and image analysis together permit the experimental determination of the atomic structure of certain, simple grain boundaries in metals such as gold. Single crystal, ∼125Å thick, (110) oriented gold films are vapor deposited onto ∼3000Å of epitaxial silver on (110) oriented cut and polished rock salt substrates. Bicrystal gold films are then made by first removing the silver coated substrate and placing in contact two suitably misoriented pieces of the gold film on a gold grid. Controlled heating in a hot stage first produces twist boundaries which then migrate, so reducing the grain boundary area, to give mixed boundaries and finally tilt boundaries perpendicular to the foil. These specimens are well suited to investigation by high resolution transmission electron microscopy.


2018 ◽  
Author(s):  
Julia Sun ◽  
Benjamin Almquist

For decades, fabrication of semiconductor devices has utilized well-established etching techniques to create complex nanostructures in silicon. Of these, two of the most common are reactive ion etching in the gaseous phase and metal-assisted chemical etching (MACE) in the liquid phase. Though these two methods are highly established and characterized, there is a surprising scarcity of reports exploring the ability of metallic films to catalytically enhance the etching of silicon in dry plasmas via a MACE-like mechanism. Here, we discuss a <u>m</u>etal-<u>a</u>ssisted <u>p</u>lasma <u>e</u>tch (MAPE) performed using patterned gold films to catalyze the etching of silicon in an SF<sub>6</sub>/O<sub>2</sub> mixed plasma, selectively increasing the rate of etching by over 1000%. The degree of enhancement as a function of Au catalyst configuration and relative oxygen feed concentration is characterized, along with the catalytic activities of other common MACE metals including Ag, Pt, and Cu. Finally, methods of controlling the etch process are briefly explored to demonstrate the potential for use as a liquid-free fabrication strategy.


Author(s):  
Mario Lesina ◽  
Lovorka Gotal Dmitrovic

The paper shows the relation among the number of small, medium and large companies in the leather and footwear industry in Croatia, as well as the relation among the number of their employees by means of the Spearman and Pearson correlation coefficient. The data were collected during 21 years. The warning zone and the risk zone were determined by means of the Statistical Process Control (SPC) for a certain number of small, medium and large companies in the leather and footwear industry in Croatia. Growth models, based on externalities, models based on research and development and the AK models were applied for the analysis of the obtained research results. The paper shows using the correlation coefficients that The relation between the number of large companies and their number of employees is the strongest, i.e. large companies have the best structured work places. The relation between the number of medium companies and the number of their employees is a bit weaker, while there is no relation in small companies. This is best described by growth models based on externalities, in which growth generates the increase in human capital, i.e. the growth of the level of knowledge and skills in the entire economy, but also deductively in companies on microeconomic level. These models also recognize the limit of accumulated knowledge after which growth may be expected. The absence of growth in small companies results from an insufficient level of human capital and failure to reach its limit level which could generate growth. According to Statistical Process Control (SPC), control charts, as well as regression models, it is clear that the most cost-effective investment is the investment into medium companies. The paper demonstrates the disadvantages in small, medium and large companies in the leather and footwear industry in Croatia. Small companies often emerge too quickly and disappear too easily owing to the employment of administrative staff instead of professional production staff. As the models emphasize, companies need to invest into their employees and employ good production staff. Investment and support to the medium companies not only strengthens the companies which have a well-arranged technological process and a good systematization of work places, but this also helps large companies, as there is a strong correlation between the number of medium and large companies.


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